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Short Course Instructors


Instructor Biograghy Course Description
Richard Ahrenkiel Fundamentals of Semiconductor Characterization: Electrical and Optical Techniques
Kateryna Artyushkova Essentials of Accurate and Reliable Surface Analysis using X-ray Photoelectron Spectroscopy (XPS) an
Michael Bagge-Hansen UHV Design and Practices
Bharat Bhushan Adhesion and Stiction: Mechanisms, Measurement Techniques, and Methods for Reduction
Nanotribology and Nanomechanics and Applications to MEMS/NEMS and BioMEMS/BioNEMS
Gerardo Brucker Analysis of Mass Spectrometer (RGA) Spectra
Partial Pressure Analysis with Residual Gas Analyzers
C.R. Brundle A Comprehensive Course on Surface Analysis and Depth Profiling by X-Ray Photoelectron Spectroscopy (
Major Analytical Techniques other than XPS, AES, FIB, SIMS
Surface Analysis, Interface, and Thin Film Analysis: The Major Methods
X-Ray Photoelectron Spectroscopy (XPS): The Basics and Advanced Approaches and Applications
A Comprehensive Course on Surface Analysis and Depth Profiling by X-Ray Photoelectron Spectroscopy (
David Castner Surface Characterization of Biomaterials
John Caughman Basics of Radio Frequency Technology (2-days)
Basics of Radio Frequency Technology (1-day)
Bob Childs An Overview of Applied Vacuum Technology
Fundamentals of Vacuum Technology
Tom Christensen Introduction to Surface Analysis
John Crowell CVD for Microelectronics
Michael Current Ion Implantation: Fundamentals, Process Controls and Advanced Applications
Diederik Depla Reactive Sputtering and Deposition
Tom Dory Semiconductor Device Manufacturing Overview
John Frankenthaler Photolithography Process in IC Production
Steve George Atomic Layer Deposition
Atomic Layer Etching
Tim Gessert An Overview of Applied Vacuum Technology
Fundamentals of Vacuum Technology
Controlling Contamination in Vacuum Systems
Operation & Maintenance of Vacuum Pumping Systems
Vacuum System Leak Detection and Basic Troubleshooting
Vacuum Pumps: An Introduction to their Operation and Maintenance
UHV Design and Practices
Vacuum System Design
Transparent Conducting Oxides: Applications, Science, Fabrication, and Characterization
Abe Ghanbari An Introduction to Ion Sources: Principles and Techniques
Plasma and Ion Beam Diagnostics: Principles & Applications
John Givens Chemical Mechanical Planarization for Microelectronics Manufacturing
Copper Interconnect Technology
Dan Graham Time of Flight Secondary Ion Mass Spectrometry
Robert Grubbs Atomic Layer Deposition: Basic Principles, Characterizations, and Applications
Plasma-enhanced CVD: Fundamentals, Techniques, and Applications
Edwin E. Harrow Cryopump Technology
Luke Hinkle Mass Flow Controllers: Fundamentals, Techniques, and Applications
Process Specific Pumping Requirements and Design
Erwin Kessels Plasma-enhanced Atomic Layer Deposition: Basics, Equipment, Applications
Bob Langley
Allan Matthews Hard Coatings by PVD Methods
Richard Matyi High Resolution X-ray Reflection and Diffraction Methods for Thin Film Characterization
Gary McGuire Surface Preparation for Thin Film Deposition
Stella Pang Microfabrication Technology for MicroElectroMechanical Systems
Neil Peacock An Overview of Applied Vacuum Technology
Fundamentals of Vacuum Technology
Total Pressure Gauging Techniques
Vacuum System Leak Detection and Basic Troubleshooting
Vacuum Sealing and Joining Techniques
Vacuum System Layout, Design Whys, Use, and Troubleshooting
Rick Reidy Cleaning and Surface Conditioning Techniques for Integrated Circuit Manufacturing
Karen Reinhardt Cleaning and Surface Conditioning Techniques for Integrated Circuit Manufacturing
Allen Riddle Fundamentals of Vacuum Technology
Mikko Ritala Atomic Layer Deposition: Fundamentals, Chemistry and Applications
Angus Rockett Photovoltaics: The Engineering, Technology and Application of Solar Cells (2 days)
Photovoltaics: The Engineering, Technology and Application of Solar Cells (1 day)
Evaporation for Thin Film Deposition
Sputter Deposition
Atomic Force and Scanning Tunneling Microscopy
Bridget Rogers Semiconductor Device Manufacturing Overview
Sudipta Seal Introduction to Nanomanufacturing
Roger Shrouf Vacuum and Cryogen Safety
Randy Shul Plasma Etching and RIE: Fundamentals and Applications
Robert Small Cleaning and Surface Conditioning Techniques for Integrated Circuit Manufacturing
TBD Focused Ion Beams (FIB) and Secondary Ion Mass Spectrometry (SIMS)
Vacuum Vessel Engineering
T.C. Smith Ion Implantation Processing
William Sproul Practice of Reactive Sputter Deposition
Thin Film Deposition by Sputter Processes
Larry Stelmack An Introduction to Ion Beam Coating Deposition Techniques
Ron Synowicki Introduction to Spectroscopic Ellipsometry
Harland G. Tompkins An Overview of Applied Vacuum Technology
Introduction to Spectroscopic Ellipsometry
Viacheslav V. Zhurin Industrial Ion Sources