Education & Outreach > Short Courses > Short Course Catalog > Vacuum & Equipment Technology > Partial Pressure Analysis with Residual Gas Analyzers

Partial Pressure Analysis with Residual Gas Analyzers

Partial Pressure Analysis with Residual Gas Analyzers

Course Objectives

  • Provide the basic knowledge required to operate residual gas analyzers (RGAs) in vacuum applications ranging from UHV to atmospheric pressures. 
  • Basic operation principles of mass spectrometers for residual gas analysis.
  • How to specify the best RGA system configuration for your application.
  • How to configure RGA software and process control I/O to perform gas analysis and track real-time changes in gas composition. 
  • Routine maintenance, tuning and calibration procedures.
  • Quantitative compositional analysis and process control (actionable information) options.
  • Spectral Interpretation: Quickly and effectively interpret typical RGA spectra. Monitor the quality of your vacuum process. Fingerprint your gas chamber. Chamber matching opportunities.
  • How to differentiate between background and process gases 
  • Typical chemical interactions between RGAs and sampled gases.

Course Description

This course provides the basic training required to interpret Residual Gas Analyzer (RGA) data and produce actionable information for process control applications. The operation of an RGA is described, with specific attention dedicated to the multiple tuning parameters available to RGA operators. Routine calibration, tuning and maintenance procedures are discussed. Typical RGA spectra are shown and analyzed and the interferences from background gases are highlighted. Quantitative calculations of gas concentrations are described.  Relevant literature references, gas libraries, tables and graphs are presented. A portion of time is always reserved to address the specific needs of the group. 

Online Costs:
$350 – AVS Platinum Member
$400 – AVS Gold/Silver Member
$400 – Non-Member
$200 – Full Time Student

Course Materials

Course Notes

Course Cost: $790

Who should attend?

Scientists, engineers and technicians who use or plan to use residual gas analyzers in research applications or in support of high vacuum industrial processes.


Gerardo Brucker
Chief Scientist and Business Unit Chief Technology Officer for Mass Spectrometry and Indirect Pressure Measurement