Course Objectives

• Understand the three phases of vacuum chamber contamination: gases, films, and particulates.
• Learn the origins of vacuum chamber contaminants and methods for controlling or eliminating them.

Course Description

Various forms of contamination in a vacuum system affect the environment in which vacuum processes are conducted. Understanding and controlling these contaminants are important steps in producing the desired chamber conditions or products.

This course addresses three phases of in-chamber contamination: gases, films, and particulates. The origin of these contaminants and methods of eliminating them are discussed. The emphasis is on defining the level of control required and identifying the appropriate procedures necessary to establish that control. There will also be discussion on the environment that must be achieved in the chamber and how it is related to the vacuum system operating and maintenance procedures and the environment outside the chamber.

This course is presented in a semi-workshop, interactive format.

Online Costs:
$350 – AVS Platinum Member
$400 – AVS Gold/Silver Member
$400 – Non-Member
$200 – Full Time Student

Course Materials

Course Notes