Karen A. Reinhardt is Principle Consultant at Cameo Consulting in San Jose, California. Prior to forming a consulting company, Karen was employed at Novellus Systems in San Jose, California. In this role she was responsible for investigating and assessing new and unique cleaning technologies that will allow realization of the ITRS roadmap with respect to smaller geometries, new materials, and the environmental issues associated with current cleaning processes. She has published more than 30 technical papers ranging from plasma processing to damage characterization and cleaning technology assessment. She has been awarded six patents. She is currently leading the ITRS surface preparation technical working group.