The technical structure of AVS is organized as a matrix. Members can participate in one or more Divisions or Technical Groups, each of which is focused around a major topical area. Members may also participate in Chapters and Student Chapters, which are regional organizations that focus on local area needs.

Spectroscopic Ellipsometry

Chapters/Divisions/Groups | Spectroscopic Ellipsometry Technical Group

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  • Industrial Applications of Spectroscopic Ellipsometry
  • Optical Characterization of Thin Films and Nanostructures
  • Novel Materials
  • Instrumentation
  • Big Data, AI and Analytical Methods
  • Organic Films and Biological Materials
  • Novel Applications and Theoretical Approaches

The Spectroscopic Ellipsometry Technical Group promotes fundamental basic and applied research using spectroscopic ellipsometry for classical materials science and optical thin film characterization to nanometer scale science and novel optical sensing concepts.

Research topics of the Spectroscopic Ellipsometry Technical Group traditionally focus on optical coatings and inorganic thin films characterization. In recent years there has been a multitude of new advances in instrumentation enabling real-time, spectroscopic data acquisition. These breakthroughs have triggered active research in analytical methods and AI, which is required to tackle the enormous data sets.

The technical group is particularly interested in the exchange of advances on ellipsometric investigations of novel optical and electronic materials and materials with subwavelength structures. Ellipsometry is essential for the characterization of thin films relevant for many industrial applications. For example, the characterization challenges faced in contemporary semiconductor fabrication processes provide inspiration for advances in the technique and its data analysis schemes. Recent advances in the technique which range from increasing accuracy and spectral range to novel acquisition procedures are fostered in this Technical Group.

In addition to the scientific mission, we support the community, including junior and minority scientists and engineers. As a tradition, we award the best student paper, which is selected based on the quality of the research, its presentation, and the discussion during the annual symposium.


Alyssa Mock
E-mail: alyssa_mock @


Megan Stokey
E-mail: megan_stokey @


Nikolas Podraza
E-mail: nikolas_podraza @


James Hilfiker
E-mail: james_hilfiker @