The technical structure of AVS is organized as a matrix. Members can participate in one or more Divisions or Technical Groups, each of which is focused around a major topical area. Members may also participate in Chapters and Student Chapters, which are regional organizations that focus on local area needs.


Chapters/Divisions/Groups | MEMS and NEMS Technical Group
  • The materials science, characterization and reliability of MEMS
  • Fabrication techniques and integration technologies for MEMS
  • Nanoelectromechanical Systems (NEMS)
  • BioMEMS
  • Microfluidics
Email comments or questions


Christian A. Zorman
E-mail: christian_zorman @


Robert Davis
E-mail: robert_davis @


Wayne Hiebert
E-mail: wayne_hiebert @


Matthew Blain
E-mail: matthew_blain @

2022 Program Chair

Zenghui Wang
E-mail: zenghui_wang @

2022 Program Co-Chair

Zhenyun Qian
E-mail: robert_davis @

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