Chapters/Divisions/Groups | MEMS and NEMS Technical Group
- The materials science, characterization and reliability of MEMS
- Fabrication techniques and integration technologies for MEMS
- Nanoelectromechanical Systems (NEMS)
- BioMEMS
- Microfluidics
Email comments or questions
Chair
Christian A. Zorman
E-mail: christian_zorman @ avs.org
Co-Chair
Robert Davis
E-mail: robert_davis @ avs.org
Secretary
Wayne Hiebert
E-mail: wayne_hiebert @ avs.org
Treasurer
Matthew Blain
E-mail: matthew_blain @ avs.org
2022 Program Chair
Zenghui Wang
E-mail: zenghui_wang @ avs.org
2022 Program Co-Chair
Zhenyun Qian
E-mail: robert_davis @ avs.org