| Manufacturing Science & Technology Technical Group
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- Advanced microelectronic processing equipment
- Diagnostics, sensors, and controls
- Modeling and simulation
- Micro contamination and defects
- Environmentally friendly manufacturing technology
The Manufacturing Science and Technology program complements other AVS sessions by treating practical aspects of manufacturing. Traditionally, MSTG has concentrated on microelectronics (now nanoelectronics). MSTG had focused on the manufacturing aspects of devices, with particular emphasis on process flow design, control and monitoring and on cost effectiveness. Now that the semiconductor industry manufactures nanoelectronic devices with gate lengths below 50 nm, MSTG has expanded to cover nanomanufacturing in general. MSTG's scope now includes manufacturing aspects of MEMS, microfluidics, and microchemical systems. From the start, MSTG has emphasized characterization and metrology. This emphasis is even more important in the new world of nanotechnology.
E-mail: alain_diebold @ avs.org
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