Vacuum Technology

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International Affiliates

Advancing the Science and Technology of Materials, Interfaces, and Processing

The Vacuum Technology Division (VTD) of AVS is an organization that meets to share new ideas and novel concepts to improve vacuum science and technology. VTD spans a broad range of topics that encompasses the science of achieving, maintaining, analyzing, and measuring vacuum across many applications. VTD promotes publications of recommended practices, instructional papers (shop notes), cutting edge research, and measurement science. VTD strives to push the limits of vacuum technology while making it accessible to all.

At annual AVS International Symposium, common themes at VTD Technical Sessions include:

Vacuum Measurement
Gas Dynamics and Modeling
Vacuum Pumps and Pumping Systems
Partial Pressure and Gas Species Analysis
Vacuum Valves, Motion, Load Locks, and components
Particulate Issues in High Vacuum and Ultrahigh Vacuum
Ultra-high and Extreme-high vacuum systems and applications
Accelerator and Large Vacuum Systems
Material Outgassing

Technical Meetings: The VTD supports advances in vacuum technology through sessions, tutorials and topical conferences at the annual AVS International Symposium and Exhibition, which is held each fall. VTD also runs an Ask-the-Expert booth at the Symposium which allows scientists with a vacuum specific problem or question to connect with an expert in that particular field.

Awards: VTD is a strong proponent of supporting the next generation of vacuum scientists. Yearly awards are presented to reward the best student posters and presentations. Additionally, we have an Early Career Award that is awarded to someone who recently graduated or new to the field but is already making great strides in vacuum research. Finally, a Note Award is given for the best "how to" article published in JVST B.

Join AVS

As a member-driven, interdisciplinary organization, AVS supports networking among academic, industrial, government, and consulting professionals involved in a variety of disciplines—chemistry, physics, materials science, engineering, biology, mathematics, business, sales, etc.—through common interests related to the basic science, technology development, and commercialization of materials, interfaces, and processing.

Members choose AVS not only because it is important to their professional development, but for the networking opportunities it provides, as well as a high level of camaraderie they enjoy at our meetings and events. The interdisciplinary nature of AVS offers the opportunity for very unique collaborations in many different areas of science and technology. In addition, AVS encourages your participation in Society leadership roles, offering easy entry into our committees, divisions, and technical groups.

Individuals obtain membership in the local chapter by joining the national AVS organization. On a national level, AVS provides a number of resources to members. Each year, the AVS International Symposium and Exhibition features more than 1,200 technical papers and draws approximately 3,000 scientists from around the world. AVS National also sponsors several topical conferences that provide in-depth investigation into a particular technique or field. AVS offers journals, books, monographs, and short courses.

Officers

2026 Chair, 2027 Program-Chair
Julia Scherschligt
email: julia_scherschligt @ avs.org

2026 Chair-Elect, 2027 Chair, 2028 Program-Chair
Alan van Drie
email: alan_vandrie @ avs.org

2026 Program-Chair
Freek Molkenboer
email: freek_molkenboer @ avs.org

Secretary
Marcy L. Stutzman
email: marcy_stutzman @ avs.org

Treasurer
Jacob Ricker
email: jacob_ricker @ avs.org

Executive Committee Members

Terms ending 2028
Ian Malloch
email: ian_malloch @ avs.org

Keith Middleman
email: keith_middleman @ avs.org

Terms ending 2027
Klaus Bergner
email: klaus_bergner @ avs.org

Russell Gleason
email: russell_gleason @ avs.org

Terms ending 2026
Christopher Malocsay
email: chris_malocsay @ avs.org

Charles Smith
email: charles_smith @ avs.org

Subcommittees/Event Coordinators

Ask-The-Expert Coordinator
Alan van Drie
email: alan_vandrie @ avs.org

VTD Student Award Coordinator
Yev Lushtak
email: yevgeniy_lushtak @ avs.org

VTD Early Career Award Coordinator
Gerardo Brucker
email: gerardo_brucker @ avs.org

Giulia Lanza
email: giulia_lanza @ avs.org

Note Award
Giulia Lanza
email: giulia_lanza @ avs.org

Team VTD 5K Fun Run Coordinator
Jim Fedchak
email: james_fedchak @ avs.org

Social Media
Jay Hendricks
email: jay_hendricks @ avs.org

VTD Web Coordinator
Martin Wuest
email: martin_wuest @ avs.org

IUVSTA Rep.
Jay Hendricks
email: jay_hendricks @ avs.org

Vacuum Technology Division Early Career Award

The VTD Early Career Award strives to recognize outstanding experimental and/or theoretical work related to vacuum science and technology by a scientist or engineer early in their career.

For more information, click here

Recent Winners of the VTD Early Career Award

Vacuum Technology Division Student Poster Competition

Vacuum Technology Division Student Poster Competition – Known as the “Student-Built Vacuum System Competition (alias - Junkyard Wars of Vacuum Technology)," this is a competition for student posters that describe the design, development, and/or use of “student-built vacuum systems.”

For more information, click here

Recent Winners of the VTD Student Competition

Vacuum Technology Division (VTD) Student Presenter Award

Vacuum Technology Division (VTD) Student Presenter Award: This Award is given at the annual AVS International Symposium to encourage students to present their research work in the VTD sessions during the Symposium.

For more information, click here

Recent Winners of the VTD Student Competition

JVST B Technical Note Award

The Journal of Vacuum Science & Technology B publishes short “how-to” articles called Technical Notes. Each year the VTD gives one or more awards for the best Technical Notes that appear in JVST B.

For more information, click here

Recent Winners of the VTD Technical Note Award

International Science and Engineering Fair 2012

First Prize ($1000) was awarded to Andrew Kenneth Noonan, 15, International Baccalaureate School at Bartow High School, Bartow, Florida. Andrew won the prize for the project "Solar Wind: Its Effect on Radio Transmissions".

Second Prize ($500) was awarded to Adam Joseph Bowman, 16, Montgomery Bell Academy, Nashville, Tennessee. Adam won the prize for the project "The Development of Low Voltage, Solid-State Plasma Focus Devices for Portable Radiation Sources". Adam also won a special ISEF award in 2010.

International Science and Engineering Fair 2011

First Prize ($1000) was awarded to Sahir Raoof, 17, Jericho Senior High School, Jericho, New York. Sahir won the prize for the project “Isolation and Optimization of the Radial Electric Field for the Proton Electric Dipole Moment Experiment".

Second Prize ($500) was awarded to Dylan Edward Moore, 17, Alameda Community Learning Center, Alameda, California. Dylan won the prize for the project Finding Harmonics in Plasma".

International Science and Engineering Fair 2010

First Prize ($1000) was awarded to Adam Joseph Bowman, 14, of Montgomery Bell Academy, Nashville, Tennessee. Adam won the prize for the project "The Efficiency of a Small Particle Accelerator at Irradiating Various Targets and Producing Radiation". Adam also won 4th Place in the Grand Awards election.

Second Prize ($500) was awarded to Taylor Ramon Wilson, 15, of The Davidson Academy of Nevada, Reno, Nevada. Taylor won the prize for the project "The Detection of Prompt and Delayed Induced Fission Gamma Radiation, and the Application to the Detection of Proliferated Nuclear Materials". Taylor also won these special awards: European Organization for Nuclear Research-CERN; United States Army Plus & 3rd place in the Grand Awards election.

First prize ($1,250) was awarded to Eric Foss of Covington, WA. Eric designed and built an inertial electrostatic confinement plasma system to study parametric relationships of the reactor. A picture of his system is shown below. He built an electrolysis system to supply deuterium gas from heavy water and programmed a LabView data acquisition system to measure electric field strength, current, chamber pressure, and temperature. He wrote a MATLAB script to compare his results with the Paschen model.

Second prize ($750) was awarded to Taylor Wilson of The Davidson Academy of Nevada. Taylor and his advisor have built a “Fusor” to produce neutrons for industry and medicine. The goal was to significantly increase neutron flux. The experiments carried out used various amounts of Thorium, Natural Uranium, and depleted Uranium. Taylor has become an expert at finding used vacuum chambers and hardware, pumps, power supplies, etc.

Third Prize ($500) was awarded to Katherine Fang of Pioneer High School in Ann Arbor, MI. Katherine completed some very nice work on gold-thiolate nanoparticle vapor sensors. These sensors can be used as part of a micro gas chromatography system to separate and identify chemicals associated with explosives. Higher temperatures help the heavy particles move through the GC column but, at some point, the higher temperatures damage the sensors. Katherine pursued the goal of finding the maximum operating temperature for the sensors before significant degradation occurred.

ISEF 2000-2008

2008 Erin Zeqja
2007 Stephen Michael Bergin, Daniel Scott Katz, Thiago David Olson
2006 John Thomas Hagen, Rohith Chandrasekar, Jessica Lynn Laviolette
2005 John Thomas Hagen
2004 Michael J. Pizer, Trevor Elliot Powers, Matthew James Mokler
2003 Brandon Emerson Powers, Joline Marie Fan, Ray Chengchuan He
2002 Erin Briann Jennings, Matthew Ryan Leonard, Zachary Aaron Parvin, Rachel Lauren Rosenberg
2001 Anna Elizabeth Aubin, Garrett Joseph Young, William Charles Young
2000 Matthew Douglas Baumann, Fu-Feng David Lee, Garrett J. Young

Recent winners of the VTD student competition

2025

Aiman Al-Allaq, Old Dominion University, receives the 2025 Vacuum Technology Division Student Presenter Award at AVS-71 in Charlotte, NC, from Julia Scherschligt, VTD Student Award Coordinator and Freek Molkenboer, VTD Chair, for his presentation “Comparative Water and Hydrogen Outgassing Behavior of Bare vs. Magnetite-Coated AISI 1020 Low-Carbon Steel”.

2024

Aiman Al-Allaq, Old Dominion University, receives the 2024 Vacuum Technology Division Student Presenter Award at AVS-70 in Tampa, FL, from Julia Scherschligt, 2024 VTD Student Award Coordinator, for his presentation “Surface-Driven Vacuum Performance: Low Carbon Steel’s Promise and Limitations in XHV Applications” .

2022

Carolina Adame, CEFITEC, Nova School of Science and Technology, Portugal, receives the 2022 Vacuum Technology Division Student Poster Award at AVS-68 in Pittsburgh, PA, from Jacob Ricker (left) and Yevgeniy Lushtak for her poster presentation "Amorphous Carbon Thin Films: Influence of Hydrogen Contamination on the Secondary Electron Emission Properties".

Ricardo A. S. Silva, CEFITEC, Nova School of Science and Technology, Portugal, receives the 2022 Vacuum Technology Division Student Presenter Award at AVS-68 in Pittsburgh, PA, from Jacob Ricker (left) and Yevgeniy Lushtak for his poster presentation "Novel Cylindrical Hot Cathode Ionisation Gauge".

2019

David Beverstock, Jefferson Laboratory, was the Vacuum Technology Division 2019 Student Presenter Award Winner. He received his award for the presentation of the “Characterization of NbTiN thin film structures” at AVS 66 in Columbus, OH. The prize was given by Jacob Ricker (left) and James Fedchak (right).

Derek Hammar, Coe College, receives the 2019 Student Poster Award by the Vacuum Technology Division Student Award Coordinator, Jim Fedchak for his poster presentation of “Modeling of NEG pump performance during saturation”.

2018

Martin Viktor Johansson, of Umeå University receives Student Presenter Award presented by Vacuum Technology Division Student Award Coordinator, Jim Fedchak, along with Gerardo Brucker, and Steve Borichevsky.

William S. Johnson receives Student Presenter Award presented by Vacuum Technology Division Student Award Coordinator, Jim Fedchak and Vacuum Technology Division Chair Steve Borichevsky.

2017

Student Poster Award winner Sushma Shrinivasan, UC Davis.

Student Poster Award winner Erik Ziehm, University of Illinois.

Student Poster Award winner Tim Verbovsek, Institute of Metals and Technology - Ljubljana, Slovenia.

2016

Bo Zhang, New Jersey Institute of Technology, receives Student Presenter Award presented by Student Award Coordinator, Jay Hendricks of the Vacuum Technology Division of the AVS.

Hugo Alvarez, Universidade Estadual de Campinas, Brazil, receives Student Poster Award presented by Student Award Coordinator, Jay Hendricks, along with Jason Carter and Yevgeniy Lushtak of the Vacuum Technology Division of the AVS.

2014

Amanda Lietz, Ph.D. Candidate, University of Michigan receives first place Student Presenter Award presented by Student Award Coordinator, Jay Hendricks of the Vacuum Technology Division of the AVS.

Eric M. Tridas, Ph.D. Candidate University of South Fl. Award receives second place Student Presenter Award presented by Student Award Coordinator, Jay Hendricks of the Vacuum Technology Division of the AVS.

2013

Jay Hendricks (VTD Student Award Coordinator/IUVSTA VSTD Chair) congratulates Zhaozhu Li at AVS-60. Zhaozhu won the Vacuum Technology Division Student Presenter Award for her presentation entitled “Photocathode Materials Able to Sustain High Currents” at the 60th AVS International Symposium and Exhibition was judged the best among vacuum technology student presenters.

2012

The Vacuum Technology Division held its annual “Student‐Built Vacuum System Poster Competition” on October 30th, 2012 during the AVS59 Tampa Symposium. Makfir Sefa of LOTRIC Metrology and Laboratory of Pressure Metrology at the Institute of Metals and Technology, Slovenia, was awarded the First Place prize of $500 for his poster entitled, “Investigation of a Method for Measurement of Water Vapor Coverage on Technical Surfaces”.

The Second Place winner, Shimizu Hideyuki of Gakushuin University, Japan, was awarded a $200 prize for his poster “An Application of Electron Stimulated Desorption Technique to Measure the Isotherm and the Mean Residence Time of Hydrogen Physisorbed on a Metal Surface”.

2010

First Place, $500 prize winner Dante DeMeo from Tufts University (left) is congratulated by Jay Hendricks (right) of the AVS Vacuum Technology Division. The competition was held during the AVS 57 Albuquerque meeting on October 19,2010.

Marcy Stutzman, 2011 Chair of the Vacuum Technology Division of AVS, congratulates second place winner, Kevin Kellogg from the University of South Florida. The competition was held during the AVS 57 Albuquerque meeting on October 19, 2010.

Left to Right: J. Hendricks, T. Gessert (VTD Poster Judges), P. Falvo, J. Wang and K. Kellogg (University of South Fl), J. Fedchak (VTD Poster Judge) and Marcy Stutzman (2011 Chair of the Vacuum Technology Division of AVS) at the Student-Built Vacuum System Poster competition held during the AVS 57 Albuquerque meeting on October 19, 2010.

Recent Winners of VTD Technical Note Award

2022-2023

Anthony T. Bollinger, Xi He, Xiaotao Xu, Xiaoyan Shi, and Ivan Božović, “Method to create cuprate tunnel junctions with atomically sharp interfaces,” J. Vac. Sci. Technol. B 40, 015001 (2022); https://doi.org/10.1116/6.0001487

2020

Sivakumar Vishnuvardhan Mambakkam and Stephanie Law: “Fabrication of topological insulator nanostructures”, J. Vac. Sci. Technol. B 38, 055001 (2020); https://doi.org/10.1116/6.0000341

2019

Julian Pilz, Martin Tazreiter, and Anna Maria Coclite, "Universal software for the real-time control of sequential processing techniques", J. Vac. Sci. Technol. A 37, 063201 (2019); https://doi.org/10.1116/1.5125052

2018

James A. Fedchak, Julia Scherschligt, Daniel Barker, Stephen Eckel, Alex P. Farrell, and Makfir Sefa, “Vacuum furnace for degassing stainless-steel vacuum components”, J. Vac. Sci. Technol. A 36, 023201 (2018); https://doi.org/10.1116/1.5016181

2017

Avyaya Narasimham, Daniel Pennock, Graham Potter, Brian Taylor and Vincent LaBella, “Economical rotatable holder for magnetotransport measurements,” J. Vac. Sci. Technol. B 35, 023201 (2017); doi: 10.1116/1.4974488

2016

Yoshihide Watanabe, Yusaku F. Nishimura, Ryo Suzuki, Hiromitsu Uehara, Tomoyuki Nimura, Atsushi Beniya, Noritake Isomura, Kiyotaka Asakura and Satoru Takakusagi, “Portable ultrahigh-vacuum sample storage system for polarization-dependent total-reflection fluorescence x-ray absorption fine structure spectroscopy,” J. Vac. Sci. Technol. A 34 (2), 023201 (2016); doi: 10.1116/1.4936344

2015

James A. Fedchak, Julia Scherschligt,` Makir Sefa, and Nicholas Phandinh, “Buidling a spring-transport package for spinning rotor gauges,” J. Vac. Sci. Technol. A 33 (3), 033201 (2015); doi: 10.1116/1.4916593

2014

Adrian Hemmi, Huanyao Cun, Silvan Roth, Jürg Osterwalder, and Thomas Greber, "Low cost photoelectron yield setup for surface process monitoring," J. Vac. Sci. Technol. A 32 (2), 023202 (2014); doi: 10.1116/1.4866095

2013

Seong Heon Kim and Alex de Lozanne, “Magnetically coupled ultrahigh vacuum manipulator with a sample grabber,” J. Vac. Sci. Technol. A 31 (1), 013201 (2013); doi: 10.1116/1.4769127

2012

James K. Schoelz, Peng Xu, Steven D. Barber, Dejun Qi, Matthew L. Ackerman, Gobind Basnet, Cameron T. Cook, and Paul M. Thibado, "High-percentage success method for preparing and pre-evaluating tungsten tips for atomic-resolution scanning tunneling microscopy," J. Vac. Sci. Technol. B 30 (3), 033201 (2012); doi: 10.1116/1.3701977

2011

No award

2010

Donald A. Chernoff and Robert Sherman, "Resurrecting dirty atomic force microscopy calibration standards," J. Vac. Sci. Technol. B 28 (3), 643 (2010); doi:10.1116/1.3388847

2009

Hye-Young Kim, Kang Ho Lee, Gyu-Tae Kim, Woun Kang, and Kyung-Jin Lee, “Fabrication of oxidation-free contacts to nanopatterned Permalloy structures," J. Vac. Sci. Technol. B 27 (6), 2487 (2009); doi:10.1116/1.3263264

2008

Jeffrey S. Tharp, David J. Shelton, Samuel L. Wadsworth, and Glenn D. Boreman, "Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrate," J. Vac. Sci. Technol. B 26 (5), 1821 (2008); doi:10.1116/1.2966431

2007

Wang Ke-Fan, Shen Zhong-Lan, Xu Peng-Shou, Pan Hai-Bin, Zou Chong-Wen, and Liu Jin-Feng, “Simple designs to avoid high-voltage discharge in a silicon electron beam-heating cell,” J. Vac. Sci. Technol. A 25 (3), 629 (2007); doi:10.1116/1.2731355

2005

Cristiano Albonetti, Massimiliano Cavallini, Massimiliano Massi, Jean François Moulin, and Fabio Biscarini, “Electrochemical fabrication of cobalt and nickel tips for scanning tunneling microscopy,” J. Vac. Sci. Technol. B 23 (6), 2564 (2005); doi:10.1116/1.2131873

2003

Nicholas F. Materer and Tyler Watt, "Temperature programmer for surface science studies with application to semiconductor surfaces," J. Vac. Sci. Technol. A 20 (2), 572 (2002); doi:10.1116/1.1432964

2002

D. L. Miller and N. T. Moshegov, "All-metal ultrahigh vacuum optical fiber feedthrough," J. Vac. Sci. Technol. A 19 (1), 386 (2001); doi:10.1116/1.1322649

2001

Adam Lapicki, Kevin J. Boyd, and Scott L. Anderson, "Kinematic sample mounting system for accurate positioning of transferrable samples," J. Vac. Sci. Technol. A 18 (5), 2603 (2000); doi:10.1116/1.1289698

2000

M. C. Polo, N. Ferrer, M. Romero, J. Pérez, M. Quevedo, and F. Vilardell, "A new and simple variable-angle accessory for infrared specular reflectance," J. Vac. Sci. Technol. A 17 (1), 319 (1999); doi:10.1116/1.581588

1999

No award

1998

T. Gannon and P. R. Watson, "An easily constructed high voltage power supply for electrostatic ion beam lensing and deflection optics," J. Vac. Sci. Technol. A 15 (5), 2820 (1997); doi:10.1116/1.580831

1997

No award

1996

G. S. Dong, Y. Chen, M. Zhang, and X. Jin, “Simple design of electron beam evaporators for 3d transition metals,” J. Vac. Sci. Technol. A 13 (1), 159 (1995); doi:10.1116/1.579434

1995

G. Navrotski, “Construction of brazed Be windows for ultrahigh vacuum use,” J. Vac. Sci. Technol. A 12 (1), 262 (1994); doi:10.1116/1.578896

1994

U. Bischler and E. Bertel, “Simple source of atomic hydrogen for ultrahigh vacuum applications,” J. Vac. Sci. Technol. A 11 (2), 458 (1993); doi:10.1116/1.578754

1993

No Award

1992

J. Simpson and J. O. Williams, “Novel system for maintaining window cleanliness in pulsed laser photochemical deposition reactors,” J. Vac. Sci. Technol. A 10 (2), 411 (1992); doi:10.1116/1.578067

1991

Berend T. Jonker, “A compact flange-mounted electron beam source,” J. Vac. Sci. Technol. A 8 (5), 3883 (1990); doi:10.1116/1.576466

1990

D. A. Steigerwald and William F. Egelhoff Jr., “Two simple metal vapor deposition sources for downward evaporation in ultrahigh vacuum,” J. Vac. Sci. Technol. A 7 (5), 3123 (1989); doi:10.1116/1.576325

1989

A. P. Jardine, M. Ahmad, R. J. McClelland, and J. M. Blakely, “A simple ultrahigh vacuum shape memory effect shutter mechanism,” J. Vac. Sci. Technol. A 6 (5), 3017 (1988); doi:10.1116/1.575471

1988

G. L. Fowler, “Coaxial helium leak detection probe,” J. Vac. Sci. Technol. A 5 (3), 390 (1987); doi:10.1116/1.574170

1987

J. P. Saint-Germain, G. Abel, and B. L. Stansfield, “A system for automatic ventilation of a turbomolecular pump,” J. Vac. Sci. Technol. A 4 (5), 2391 (1986); doi:10.1116/1.574084

1986

R. A. Langley, “Correction of a vacuum design fault in leak detectors,” J. Vac. Sci. Technol. A 3 (5), 2040 (1985); doi:10.1116/1.572924

1985

B. Bellamy and C. Colomer, “A UHV compatible and miniaturized evaporator used as a controlled source of high melting point metal vapor,” J. Vac. Sci. Technol. A 2 (4), 1604 (1984); doi:10.1116/1.572480

1984

R. A. A. Kubiak, W. Y. Leong, R. M. King, and E. H. C. Parker, “On baking a cryopumped UHV system,” J. Vac. Sci. Technol. A 1 (4), 1872 (1983); doi:10.1116/1.572231

1983

R. Adachi and K. Takeshita, “Magnetron sputtering with additional ionization by electron beam,” J. Vac. Sci. Technol. 20 (1), 98 (1982); doi:10.1116/1.571320

1982

D. L. Miller and P. G. Newman, “Low cost spinner for semiconductor surface preparation prior to MBE growth,” J. Vac. Sci. Technol. 19 (1), 124 (1981); doi:10.1116/1.571005

1981

B. R. F. Kendall, “Vacuum applications of metal foams,” J. Vac. Sci. Technol. 17 (6), 1385 (1980); doi:10.1116/1.570681

1980

S. J. Rothenberg, F. Barr, and C. T. Dziurzynski, “Improvement in the sensibility of Cahn RG-2000 vacuum microbalance,” J. Vac. Sci. Technol. 16 (6), 2115 (1979); doi:10.1116/1.570353

D. Edwards Jr., “Cold formed wire connector,” J. Vac. Sci. Technol. 16 (3), 970 (1979); doi:10.1116/1.570127

1979

R. Widmer, “Simple water-sensitive detector (emergency switch),” J. Vac. Sci. Technol. 15 (3), 1197 (1978); doi:10.1116/1.569537

Hajime Ishimaru, “Bakable aluminum vacuum chamber and bellows with an aluminum flange and metal seal for ultrahigh vacuum,” J. Vac. Sci. Technol. 15 (6), 1853 (1978); doi:10.1116/1.569853

1978

Award given but no record of name

1977

No award

1976

No award

1975

No award

1974

Jerry D. Christian and William P. Gilbreath, “Sealing of large leaks in high-vacuum systems subject to mechanical and thermal stresses,” J. Vac. Sci. Technol. 11 (4), 848 (1974); doi:10.1116/1.1312766

1973

D. R. Kastelein, "Repairing a glass vacuum bell jar seal," J. Vac. Sci. Technol. 8 (2), 464 (1971); doi:10.1116/1.1314489

1972

R. B. Dove and H. Marshak, "Shaft seal for mechanical pump," J. Vac. Sci. Technol. 8 (3), 519 (1971); doi:10.1116/1.1314591

1971

Royce K. Winge, "Leak detection in vacuum systems by a fluorescence technique," J. Vac. Sci. Technol. 7 (6), 610 (1970); doi:10.1116/1.1315888

Recent Winners of VTD Early Career Award

2022

Alex Tingle, Cold Quanta, receives the 2022 Vacuum Technology Division Early Career Award from Jacob Ricker (left) and Yevgeniy Lushtak after her talk “Much to Do About Nothing:” Advancing Compact UHV Packages for a “Quantum Everywhere” Future.

2018

Steven Schowalter, Jet Propulsion Laboratory, was the Vacuum Technology Division 2018 Early Career Award Winner. He received the award for innovative approaches to vacuum design in spaceflight instrumentation and presented the talk titled “The Development of the Spacecraft Atmosphere Monitor” at AVS 65 in Long Beach, CA.

2017

2017 VTD Early Career Award was presented to Scott Heinbuch, MKS Instruments, Inc. for innovative approaches to vacuum system design for industrial testing environments and improving the vacuum testing method for MKS experimental gauges.

2016

Sam Posen, from Fermi National Accelerator Laboratory is the VTD Early Career Award Winner for AVS63. His research on Nb3Sn thin film coatings for superconducting RF (SRF) has huge impacts on the field of particle accelerator science and technology. Sam was the first to clearly demonstrate that there is a very promising future for SRF technology beyond traditional niobium, which is approaching the theoretical performance limits. He will be giving a talk titled “Saving Megawatts in a Micron: Tailoring the Surfaces of Superconducting RF Cavities” at 4:20 PM, Tuesday November 8^th, 2016.

2015

James Burst, Research Engineer, National Renewable Energy Laboratory for Vacuum Technology Insights into Thin Film Photovoltaic Research.

2014

Jason D. Myers, the first winner of the Vacuum Technology Division Early Career award, awarded at the AVS61 in Baltimore. As part of the award, Jason gave an invited talk “Novel Vacuum Processing of Thin-Film Photovoltaic Materials”. Jason received his Ph.D. in 2011 and is a Materials Research Engineer at the US Naval Research Laboratory.

2026

High Vacuum MEMS Devices – Advances in Vacuum Technology in Microscale
- Michał Krysztof, Wroclaw University of Science and Technology, Poland
Vacuum Technology in Cork Science: From Permeability to TCA Desorption
- Orlando Teodoro, Nova School of Science and Technology, Portugal
The “Wall” in Fusion Reactors
- David Ruzic, University of Illinois at Urbana-Champaign
Ultra-High Vacuum Systems for Next Generation Gravitational Wave Detectors
- Jordan Vanosky, LIGO Laboratory, California Institute of Technology

2025

Commissioning and Early Operations of the APS-Upgrade Storage Ring Vacuum System
- Jason Carter, Argonne National Laboratory
ORNL Second Target Station (STS) Vacuum System
- Austin Chaires, Oak Ridge National Laboratory
Space Simulator – Thermal-Vacuum Chambers
- Juan Pablo Romero, INOVOAL
Advanced Roots Pumping Solutions for Demanding Applications in Fusion and Nuclear Research: The New Okta 1500 GM
- Nico Volker, Pfeiffer Vacuum, Germany
The Einstein Telescope Beam Pipe Vacuum System: The Pilot Sector
- Ivo Wevers, CERN, Switzerland

2024

Compact UHV Technology for Quantum
- Alex Kato, IonQ
3D Printed Ion Traps for Quantum Computation
- Kristin Beck, Lawrence Livermore National Laboratory
Advancements Through the Ages: The Evolution of Vacuum Technology
- Kurt Lesker IV, Kurt J. Lesker Company
Analysis and Adaptability of the ITER Diagnostic Residual Gas Analyzer Vacuum System
- Brendan Quinlan, Oak Ridge National Laboratory
Vacrysim - Modeling Noise from Residual Gas for Cryogenic Interferometry
- Henk Jan Bulten, Nikhef
Optimal Load Lock Pressure Measurement Technology?
- Tim Swinney, MKS Instruments‚ Inc.‚ Pressure and Vacuum Measurement Group
Photochemistry and Photocatalysis of Alcohols – Vacuum Technology for Sustainable Chemistry
- Moritz Eder, TU Wien
Gas Analysis and Vacuum Characterization for Space and Lunar Exploration
- Andres Diaz, INFICON
Exploring Vacuum Technology in Nuclear Fusion: Challenges and Opportunities within STEP Fuel Cycle
- Sophie Davies, United Kingdom Atomic Energy Authority

2023

Novel Diaphragm Vacuum Gauge
- Masatoshi Ono, Vacuum Products Corporation
Improved Reliability of High Sensitivity Leak Testing of Large Chambers
- Brad Shaw, Leak Testing Corporation
Update on the A+ Upgrade to LIGO and the COSMIC Explorer
- Michael Zucker, LIGO
On ground and in-orbit decontamination strategies for space equipment
- Faye Delphine, CNES
Stand-Alone Vacuum Cell for Compact Ultracold Quantum Technologies
- Oliver Burrow, Strathclyde University
State of the Art and Roadmap for Hybrid Quantum-Hpc Computing Clouds in Europe
- Richard Versluis, TNO/QuTech
Cs Intercalation of 2d Material Encapsulated Photocathodes
- Mengjia Gaowei, Brookhaven National Laboratory
Saving Energy of Subfab Equipment for Semiconducor Manufacturing
- Yohei Yoda, EBARA

2022

Much to Do About Nothing: Advancing Compact UHV Packages for a “Quantum Everywhere” Future
- Alex Tingle, ColdQuanta
Towards an Ionization Vacuum Gauge Suitable as a Reference Standard
- Nenad Bundaleski, NOVA University Lisbon
Developments of the Vacuum Systems Required for the Electron Ion Collider
- Charles Hetzel, Brookhaven National Laboratory
Vacuum System of the MAX IV 3 GeV Storage Ring: Design and Performance
- Marek Grabski, Max IV Laboratory
CW Superconducting Linac for the LCLS-II HE Free Electron Laser at SLAC
- Marc Ross, SLAC National Accelerator Laboratory
Vacuum Materials for the Next Generation Gravitational Wave Detectors
- Ivo Wevers, G. Bregliozzi, P. Chiggiato, M. Rimoldi, C. Scarcia, M. Taborelli, CERN
Vacuum Design for a Cryogenic Gravitational Wave Detector
- Rana Adhikari, C. Wipf, California Institute of Technology
Design of ITER Roughing Pump System
- Charles Smith, S. Smith, US ITER
Design and Fabrication of Ultra-High Vacuum Test System for Quantitative Determination of Hydrogen Gettering and Permeation of Various Materials
- Ewa Ronnebro, R. Storms, S. Suffield, Pacific Northwest National Laboratory;
- M. Boeckmann, A. Parrot, J. Alfrey, Vacuum Technology, Inc

2021

Innovations in Gauges and Gas Analysis
- Klaus Bergner, VACOM
Overview of the Outgassing Behavior of Metals Polymers and Ceramics
- Katharina Battes, Karlsruhe Institute of Technology (KIT)
SynRad and MolFlow for Vacuum Analysis of CERN
- Marton Ady, CERN
Progress in the Construction of the ITER Vacuum System and Advancement in Vacuum Technologies for Fusion
- Robert J.H. Pearce, ITER
Latest Developments and Uses of Neg Technology in Fusion Energy Applications
- Enrico Maccallini, SAES Getters
Micro-Scale Fusion and Neutron Generation from Nanowire Arrays Irradiated With Ultrashort Laser Pulses of Relativistic Intensity
- Jorge Rocca, Colorado State University
Vacuum Technology for Fusion Research
- Christian Day, Karlsruhe Institute of Technology (KIT)
Small Diameter NEG Coated Vacuum Chambers by Copper Electroforming
- Lucia Lain Amador, CERN
Next Generation Synchrotron Light Source: Vacuum System of the 3 GeV Electron Storage Ring at MAX IV Laboratory
- Marek Grabski, Max IV Laboratory
The NIST Quantum Logic Clock and its Vacuum Performance
- David Leibrandt, NIST-Boulder
Vacuum Technology of Hyperloop
- Tom Kammermeier, Leybold
Quality and Regulatory Issues for Vacuum Technology in Nuclear Power Plants
- Charles Smith, US ITER / ORNL

2019

Superconducting Microwave Cavity Quantum Pressure Standard in the range 200 Pa to 20 kPa
- Laurent Pitre, LNE Cnam-LCM

e-beam Melting of Copper
- Diana Gamzina, SLAC

Gas Dynamic simulations
- Irina Graur, University of Aix-Marseille

Next generation LIGO vacuum system
- Chandra Romel, LIGO Hanford

HE-LHC Vacuum System Design
- Giuseppe Bregliozzi, CERN

Vacuum System Modeling, Design, and Commissioning at the Facility for Rare Isotope Beams SEM Tools
- Ian Malloch, MSU

Status of the vacuum technology for PV/NREL contributions to photovoltaics
- Tim Gessert, NREL

Single Atom Transistors
- Rick Silver, NIST

Defect Manipulation to Control Energy Processes in Electronic Materials
- Leonard Brillson, Ohio State

2018

Pharmaceutical Freeze-Drying and Vacuum-Drying: Challenges and Opportunities
- Evgenyi Shalaev, Allergan

Beamline Technology and Current Modeling Capabilities for Ion Implantation
- Svetlana Radovanov, Applied Materials, Varian Semiconductor Equipment

Gas Adsorption and Desorption Properties of 3D Printed Objects
- Matt Hartings, American University

The Development of the Spacecraft Atmosphere Monitor
- Steven Schowalter, Jet Propulsion Laboratory

Design of Vacuum Control System for the Linac Coherent Light Source II (LCLS-II) at SLAC National Accelerator Laboratory
- Shweta Saraf, SLAC National Accelerator

The Importance of Vacuum Cleanliness in Semiconductor Process Control SEM Tools
- Irit Ruach Nir, Applied Materials, Israel

Vacuum Chamber Design and Fabrication
- Steve Greuel, Nor-Cal Products

Plasma Window as Vacuum Atmosphere Interface for Various Applications
- Ady Hershcovitch, Brookhaven National Laboratory

Compact Ultra High Vacuum Systems for Applications of Cold Matter
- Evan Salim, ColdQuanta Inc.

2017

Fast-Switching Dual Fabry-Perot Cavity-based Optical Refractometry – A Powerful Technique for Drift-Free Assessment of Gas Refractivity and Density
- Ove Axner, Umeå University, Sweden

ROSINA/Rosetta: Exploring the origin of our solar system with mass spectrometry in space
- Kathrin Altwegg, Univ of Bern, Switzerland

Weight of water on the solid surface in air and vacuum
- Richard Green, NRC, Canada

A rigorous approach to effluent gas management for the vacuum processing industry
- Paul Dozoretz, MKS Instruments, USA

Vacuum technology that enabled the detection of gravitational waves
- Rai Weiss, LIGO/MIT, USA

Adsorption/Desorption from amorphous carbon coating at cryogenic temperatures
- Anne-Laure Lamure, CERN, Switzerland

Quantum Approach to Extreme High Vacuum Metrology
- Julia Scherschligt, NIST, USA

Particle Contamination Control in the accelerator vacuum systems of the European XFEL
- Lutz Lilje, DESY, Germany

UHV- and cryo-transfer between independent analytical instruments
- Urs Maier, Ferrovac, Switzerland

Silicon-micromachined Turbomolecular Pump
- Wei Yang

New aspects on heavy ion-induced desorption and their impact on next generation accelerators
- Markus Bender, GSI, Germany

Development, Solution of Design Issues, Final Design and Performance of an Electrostatic Triode Getter-Ion Pump, 1967- 1973
- Paul Arnold, MKS Instruments, USA

Superlubricity of Hard Compliant Carbon Coatings with green lubricants: Role of Surface Chemistry and Structural Changes
- Maria-Isabel De Barros Bouchet, Ecole Centrale de Lyon - LTDS, France

Structure Evolution in Tribological Interfaces Studied by Multilayer Model Alloys
- Martin Dienwiebel, KIT, Germany

Studying Dynamic and Structured Plasma Systems Utilizing Laser-Collision Induced Fluorescence
- Ed Barnat, Sandia National Laboratory, USA

In-Situ Diagnostics of Processing Plasma and Semiconductor Films for High-Efficiency Silicon Hetero-Junction Solar Cells
- Shota Nunomura, AIST, Japan

2016

Industry Practice for Using Primary Leak Standards to Validate Calibration Methods
- Jason Alfrey, Vacuum Technology INC

Vacuum Adventures on the Way Towards a Field-Portable Helium Isotope Detector
- Gary McMurtry, University of Hawaii

Applicative Challenges for today’s Turbo Molecular Pumps
- Adrian Wirth, Pfeiffer Vacuum GmbH, Germany

Vacuum System Analysis of a Next Generation Light Source with Synrad and MolFlow+
- Jason Carter, Argonne National Laboratory

Vacuum Design of the European Spallation Source Target Monolith
- Peter Ladd, European Spallation Source, Sweden

Saving Megawatts in a Micron: Tailoring the Surfaces of Superconducting RF Cavities
- Sam Posen, Fermi National Accelerator Laboratory

High Quality Vacuum Components for UCV and UHV Applications
- Michael Flämmich, VACOM, Vakuum Komponenten & Messtechnik GmbH, Germany

Vacuum Transport for Realization and Dissemination of the Redefined Kilogram at NIST
- Eric Benck, NIST

It's All Because of the Vacuum...
- Frederick Dylla, American Institute of Physics

The Next Generation Quantum-based Metrology for Miniaturized Sensors and Standards
- Gregory F. Strouse, National Institute of Standards and Technology

2015

The Evolution of Cryopumps
- Sergei Syssoev, Brooks Automation, Chemsford, MA
MAXIV Vacuum System: From Design to Operation
- Eshraq Al Dmour, Max IV, Lund University, Lund Sweden
Double Deflection and Enhanced Detection - The Use of a Novel Ion Optics for Metastable Rejection and Improved Detection in the Low ppb Range.
- Jonathon Leslie, MKS Instruments, Inc., Andover, MA
The Deployment of a Commercial RGA to the International Space Station
- Matt Kowitt, Stanford Research Systems, Sunnyvale, CA
History of Widely-used Vacuum Gauges and the Variations and Motivations that Occurred Along the Way: How Did We Get Where We Are?
- Paul Arnold, MKS Instruments, Inc., Granville Phillips Product Center, Longmont, CO
Current Advances in Materials and Methods for UHV and XHV Environments
- Jed Bothell, Atlas Technologies Port Townsend WA
Current Advances in Materials and Methods for UHV and XHV Environments
- Austin Henry, Atlas Technologies Port Townsend WA
Plasma Cleaning of SEMs and Large Vacuum Systems
- Ron Vane, XEI Scientific Inc., Redwood City, CA
Mobile Vacuum Environments and Their Applications for Semiconductor Manufacturing
- Daniel Babbs, Brooks Automation, Chelmsford, MA
Experience of UHV Transportation of Critical Components
- Paolo Michelato, Italian National Institute for Nuclear Physics (INFN), Milan, Italy
Particle Behavior in Vacuum Systems: Protection Schemes for EUVL Critical Surfaces, Speed Controlled Particle Injection, Prevention of Particle Formation during Pump Down
- David Pui, University of Minnesota, Minneapolis, MN

2014

Miniature Fiber Optic Pressure Sensors: Technologies and Applications
- Miao Yu, University of Maryland, College Park
How to Create as Less as Possible to Make the Best as Possible
- Norbert Koster, TNO Technical Sciences, Netherlands
Novel Vacuum Processing of Thin-Film Photovoltaic Materials
- Jason Myers, U.S. Naval Research Laboratory
Gas Dynamics Modelling Efforts at CERN
- Roberto Kersevan, CERN,Switzerland
Improving the Performances of Getter Pumps: Recent Developments in NEG Technology
- Fabrizio Siviero, SAES Getters, Italy
Advanced High Speed Water Vapor Cryopumps: Enabling Today’s Vacuum Processes
- Kevin Flynn, Brooks Automation, Inc., Polycold
Our Present Understanding of Outgassing
- Manfred Leisch, Graz University of Tech., Austria
Ultimate Limits in the Gas Composition Determination Within Small Sealed Volumes by Quadrupole Mass Spectrometry
- Vincenc Nemanic, Jozef Stefan Institute, Slovenia
Vacuum Technology Developments at Daresbury Laboratory for Modern Accelerators
- Keith Middleman, (Presented by: O.B. Malyshev), STFC Daresbury Laboratory, UK
Progress in Thin Film Technology for Superconducting RF Applications
- Anne-Marie Valente-Feliciano, Thomas Jefferson National Accelerator Facility
Load locks, Transfer arms, and other In-Vacuum Motions in the Cornell DC Photoelectron Gun Development Project
- Karl Smolenski, Cornell University
Design Optimization and Fabrication Progress of ITER’s Large Custom Vacuum Pumps
- Robert Pearce, Oak Ridge National Laboratory

2013

The Important Role of Vacuum Technology in the Redefinition of the Kilogram
- P.J. Abbott, NIST

Modeling and Simulation of Fast Flows in the Vacuum Regime,
- S. Pantazis, Physikalisch-Technische Bundesanstalt (PTB), Germany

60 Years of Vacuum Gate Valve Developments
- J.F. Hartnett, Vacuum Research Corporation

A History of Vacuum from My Perspective!
- K.J. Lesker III, K.J. Lesker IV, Kurt J. Lesker Company

How We’ve Learned More & More About Less and Less So That Now We Know a Whole Lot About Nearly Nothing - Vacuum Measurement Over the Years
- S.R. Goldfarb, Consultant

The Quest for Extreme High Vacuum
- H.F. Dylla, American Institute of Physics

The Relationship Between Moisture Ingress, Hermeticity Testing, and Internal Gas Analysis (IGA) of Hermetic Structures
- J.C. Pernicka, Pernicka Corporation

Applications and Limitations of Wear-Resistant PVD Coatings
- A. Mueller, OC Oerlikon Balzers AG, Liechtenstein

Optics Contamination in EUV Lithography: Measurement, Modeling and Mitigation
- S.B. Hill, N.S. Faradzhev, T.B. Lucatort, National Institute of Standards and Technology (NIST), B.V. Yakshinskiy, R.A. Bartynski; Rutgers University

Recent Innovation in Dry Pumping Technology
- A.D. Chew, I. Stones, N. Schofiel, Edwards, UK

Symbiotic Relation between High Energy Accelerators and Advanced Medical Treatments
- J.R. Noonan, D.R. Walters, Argonne National Laboratory

Growth and Characterization of High Quantum Efficiency Photocathodes for the Cornell ERL R&D Project
- L. Cultrera, I. Bazarov, B. Dunham, Y. Li, X. Liu, A. Bartnik, K. Smolenski, S. Karkare, W. Schaff, T. Moore; Cornell University

2012

A Truly Cold Vacuum Gauge for Ultra–high Vacuum and Extreme–high Vacuum Employing a Hydrogen Absorber
- G.A. Mulhollan, Saxet Surface Science First International

Comparison of Standard Leak Calibrations of Metrological Institutes
- K. Jousten, K. Arai, U. Becker, O. Bodnar et.al, PTB, Germany

Mass Spectrometry a Mile Deep: Issues and Solutions for Underwater Vacuum Systems
- R.T. Short, SRI International

Gas Dynamics Modelling for Particle Accelerators
- O.B. Malyshev, STFC Daresbury Laboratory, UK

Design of the Vacuum System for the SuperKEKB Positron Ring
- Y. Suetsugu, K. Kanazawa, K. Shibata, T. Ishibashi, H. Hisamatsu, M. Shirai, S. Terui, High Energy Accelerator Research Organization, Japan

Contamination Control and Cleaning Techniques for Ultra Clean Vacuum Systems
- H.C.G. Werij, N.B. Koster, J.C.J. van der Donck, A.J. Storm, R. Verberk, R. Versluis, TNO Technical Sciences, The Netherlands

Superconducting Niobium for Accelerator Cavities: Status and prospects (VT+AS+SS)
- M.J. Kelley, Jefferson Lab and College of William and Mary

2011

Extending the Range of the Spinning Rotor Gage for Vacuum Measurements and Calibrations
- M.L. Duncan, J.A. Keck, Oak Ridge National Laboratory
Numerical Methods for the Design of Vacuum Systems with Examples
- R. Kersevan, ITER International Organization, France
Low Uncertainty Measurements of Trace Water Vapor Based on Cavity Ring-Down Spectroscopy
- T. Hodges, National Institute of Standards and Technology
Status of National Synchrotron Light Source II Vacuum Systems
- H.C. Hseuh, A. Blednykh, L. Doom, M.J. Ferreira, C. Hetzel, J.P. Hu, S. Leng, C. Longo, V.Radindranathh, K. Roy, S. Sharma, F. Willeke, K. Wilson, D. Zigrosser, Brookhaven National Laboratory
Examples of Surface Related R&D on Nb Samples and SRF Cavities for Particle Accelerators at JLab
- A.T. Wu, Thomas Jefferson National Accelerator Facility
New UHV Low Temperature Scanning Probe Microscopy Facility for the Study of Future Electronic Materials
- J.A. Stroscio, National Institute of Standards and Technology
Modelling and Simulation of the ITER Cryopumping Systems
- Chr. Day, Karlsruhe Institute of Technology, Germany
Waste Not, Want Not
- L.V. Mannes, South Park Platinum, Inc.

2010

Practical Issues and Applications for Vacuum and Hermetic Microsystems Packaging
- K. Ewsuk
Miniature Mass Spectrometers and Ambient Analysis by Mass Spectrometry
- R.G. Cooks
Point-of-Use Abatement Devices and Exhaust Management Strategies
- J. Brown
Architecture and Operation of the Z Pulsed Power Facility Vacuum System
- J.W. Weed

2009

Silicon-based Surface Treatments for Improved Vacuum System Throughput, Inertness, and Corrosion Resistance
- D.A. Smith
A Novel Electrostatic Ion Trap Mass Spectrometer
- B.J. Hinch
Gas Dynamics Aspects of Atomic Layer Deposition
- S.M. George
Vacuum R&D at Cornell Towards to Cornell Electron Storage Ring Test Accelerator for ILC Damping Ring and the ERL-based Light Sources
- Y. Li

2008

A Review of the Development of Cleaning Processes and Cleanliness Assessment at Daresbury Laboratory
- J.D. Herbert
Sorption Properties of Non Evaporable Getter Pumps for Selected Hydrocabons and Organic Compounds
- A. Conte
LHC Beam & Insulation Vacuum Systems
- J.M. Jimenez
Vacuum Metrology in Korea, Value Innovation for Customers
- K.H. Chung
Molybdenum Oxide Nanoparticles for Improved Lithium Ion Battery Technologies
- A.C. Dillon

2007

Miniature High Vacuum Pump for Mars Analytical Instruments
- R.J. Kline-Schoder
Development of MEMS for Space Applications
- P.W. Valek
The Role of Vacuum-Based Processes in Developing High Performance Chemical Microsensors
- S. Semancik
Review of Seven Years Field Application Experience of an EPX Single Mechanism for High Vacuum Pumping
- A.D. Chew
Surface Morphology and Surface Composition of Vacuum Fired Stainless Steel
- M. Leisch
Recent Advances to Enhance Space Simulation
- F.G. Collins

2006

Limiting Processes in Vacuum Measurement
- P. Looney
Extreme High Vacuum (XHV): The Need, Production and Measurement
- M.L. Stutzman
Outgassing of Construction Materials for Vacuum Chambers and Coatings for Reduction of Outgassing
- J. Setina
New Understanding of Ion-Beam Induced Gas Desorption
- A.W. Molvik
Experimental Investigation of the Near-Earth Space
- M. Wüest
Report from the Mars Chapter
- M.H. Hecht
Benjamin Franklin and the Meaning of Public Science
- J.E. Chaplin
Monolayers Films: From Franklin's OIl-Drop Experiments to Self-Assembled Monolayer Structures
- G.L. Richmond
The Science and Technology of Electrophotography
- L.B. Schein
From Lightning to Lighting: Physics and Technology Discharged from Franklin's Kite Experiment
- R.T. McGrath
Progress and Prospects in the Generation of High Voltage
- H.F. Dylla

2005

Selecting Vacuum Instrumentation for Your Applications
- C.R. Tilford
Pressure Dependence of Laminar-Turbulent Transition in Gases
- L.D. Hinkle
Hydrogen in Vacuum Systems: An Overview
- R.A. Outlaw
Hydrogen in Vacuum Systems
- B. Hjörvarsson

2004

John Ambrose Fleming and the Beginning of Electronics
- H.F. Dylla
Vacuum and the Electron Tube Industry
- P. Redhead
The Science and Technology of Pumping Residual Gases in Vacuum Tubes
- B. Ferrario
Vacuum Microelectronic Devices and Vacuum Requirements
- G.E. McGuire
Ultra Cleaning Techniques and Their Use in Vacuum Technology
- P.H. LaMarche
Contamination Control in PECVD Processes
- B. Shin
An Overview of the Spallation Neutron Source Vacuum Systems
- P. Ladd

2003

Fifty Years of Vacuum Science
- E.V. Kornelsen
The Measurement of Vacuum;1950-2003
- P.A. Redhead
Major Advances in Capture Pumps in the Last 50 Years
- K.M. Welch
Major Advances in Transfer Pumps; 1953-2003
- M.H. Hablanian
The Development of Ultrahigh and Extreme High Vacuum Technology for Physics Research
- H.F. Dylla
Quartz Capillary Gas Flow Meters
- R.F. Berg
How to Control Hydrogen Outgassing from Gauges and Materials
- F. Watanabe
Residual Gas in the LIGO Beam Tubes: Science, Arts and Recipes
- R. Weiss
Component Requirements for ALD Technology
- T.E. Seidel
The Role of Outgasssing, Outdiffusion and Desorption in Vacuum Coating
- D.M. Mattox
Vacuum Thermal Insulation - Inventions for the Future
- V. Nemanic

2002

Self-Assembled Monolayers of Carboxy-Terminated Poly(ethylene glycol): Protein Resistance, Biospecific Functionalization and Application to Immunodiagnostics
- R. Dahint
Analysis of Organic and Biological Materials in Ultra-High Vacuum
- D.G. Castner
Design Fabrication and Processing of Vacuum Chambers for High Energy Accelerators at Brookhaven
- H.C. Hseuh
Advanced Materials and Fabrication Techniques for the Next Generation Light Source
- J.R. Noonan
Gaede Langmuir Award Address: The Impact of Non-evaporable Getters on the Evolution of UHV/XHV Technology
- C. Benvenuti
Ultra-sensitive Detection of Helium Release from Metal Tritides
- J. Poths
Influence of Thermal and Surface Treatments on the Outgassing Of Austenitic Stainless Steels Studied by Thermal and Electron Stimulated Desorption
- P. Chiggiato
Eight Unconventional Gauges: A User's Impressions
- B.R.F. Kendall
Using DeviceNet for Improved Vacuum Monitoring
- C.E. Karlsen
Modeling Molecular Drag Pumping in the 20th Century: A Personal View
- J.C. Helmer

2001

Sealed Vacuum Systems including Vacuum Insulation
- I.P. Della Porta
Precision Multilayered Thin Films for Manufacturing of the Next Generation of Computer Chips
- E Spiller
Gold Nanoparticle Films via Inert Gas Deposition: Biased Percolation and Current Induced Organization During and after Deposition
- L.B. Kish
Towards the Single Pump Solution - A Recent Advance in High Speed Machines for Dry Vacuum Pumping
- R.G. Livesey
Water Vapor Capture Within a Vacuum Chamber - The Technology of Meissner Cryopumping Yesterday and Today
- D.J. Missimer
History of Alcatel Turbomolecular Pump Development
- R. Mathes
Turbine-type Pumps in High-vacuum Technology
- M.H. Hablanian
New Results on Outgassing of Stainless Steel and Insulators
- L. Westerberg
A Different View on the "Water Problem
- R.W. Dobrozemsky
Performance Test of Vacuum Components and System
- K.H. Chung
Residual Gas Analysis using Microengineered Systems
- S. Taylor
Advances in Semiconductor Physical Vapor Deposition Equipment; Vacuum, System Architecture, and PVD Source Technology
- D.J. Harra
Vacuum System Architecture for Disk and Flat Panel Production Tools
- J. Busch
Downstream Effluent Management Subsystems for Semiconductor Manufacturing Processes
- Y. Gu
RHIC Commissioning and First Results
- S. Ozaki

2000

Field Emission Characteristics of Carbon Nanotubes
- B.R. Chalamala
Reliability of Silicon-based Field Emission Displays
- T. Akinwande
Illumination Sources for Laser-based Displays
- B. Bischel
Challenges in Bringing Green Manufacturing Technologies to the Clean Room Floor
- S. Raoux
Eliminating Perfluorocompound Gas Emissions from CVD Chamber Cleans
- P.J. Maroulis
Treatment of Wastes from Chemical Mechanical Polishing Operations
- S. Raghavan
Advanced Chemicals for Semiconductor Processing
- E.R. Sparks
The United States Constitution and Vacuum Technology
- C.R. Tilford
The Role of Two-dimensional Compressibility in Physisorption, Competitive Adsorption and Dynamic Displacement
- G.A. Kimmel
Free Jets in Vacuum Technologies
- A.K. Rebrov
Design, Construction and Maintenance of Large Vacuum Systems
- K.M. Welch
The Interesting and Important Problem of Water in Vacuum Systems
- H.F. Dylla
Miniature Vacuum Pumps
- J.W. Weed
A Practical Guide to the use of Bayard-Alpert Ionization Gauges
- J.H. Singleton

Micromechanical Devices for Force Measurement
- T.W. Kenny
Developing MEMS Vacuum Pumps
- E.P. Muntz
Nanotribology and Stiction Studies of Surface Micromachined Electrostatic Micromotors Using An Atomic Force/Friction Force Microscope
- B. Bhushan

1999

Effects of Residual Gas Exposures on the Emission Characteristics of Field Emission Arrays
- R.M. Wallace
Hermetic Sealing and Evacuation of Candescent's ThinCRTTM
- T.S. Fahlen
Enhanced Bayard-Alpert Gauge with Accuracy and Stability Improved by Design and Construction
- P.C. Arnold
Vacuum Systems, Deposition Sources, Measurement and Control Tools for the Semiconductor Industry (1950-1975)
- D.E. Meyer
Evolution of Integrated Circuit Vacuum Processes: 1962-1975
- R.K. Waits
Refining Old Vacuum Knowledge for Today's Semiconductor Manufacturing Processes
- J.F. O'Hanlon
Review of Pumping by Thermal Molecular Pressure
- J.P. Hobson
Dry Vacuum Pumps - A Method for the Evaluation of the Degree of Dry
- A.D. Chew
Ebara AAS-series Screw-type Dry Vacuum Pump
- Y. Watanabe
Adapting Dry Vacuum Technology to Cu CVD Effluent Abatement in Integrated Circuit Manufacturing
- J.R. Bottin
Dry Pumping
- P. Annandale
The Dry Pump in the Industrial Market
- J. Scherbik
Review of Models for the Outgassing of Water Vapor from Metallic Surfaces
- B.B. Dayton
Quadrupole Mass Spectrometry using MEMS
- S. Taylor
John A. Thornton Memorial Award Lecture: The Search for Improved Transparent Conducting Oxides: An Investigation of CdO, Cd2SnO4, and Zn2SnO4
- T.J. Coutts
Experiences on the Preparation and Assembly of The Superconducting Linear Accelerator for the TESLA Test Facility
- A. Matheisen

View Recommended Practices

The AVS Vacuum Technology Division runs an Ask-the-Expert booth at the AVS Symposium every year which allows scientists, engineers and technicians with vacuum specific problems or questions to connect with experts in that field. Ask-the-Experts is an unbiased forum resourced with renown experts in the field of vacuum technology that can help solve many vacuum related problems. This yearly event is sponsored by leading companies in the field of vacuum technology but the teachings and opinions provided by the group are always free of any commercial interest. Visit the Ask-the-Experts booth to brainstorm solutions to your current problems and to network with other members of the vacuum technology community.

Past Questions have included:

“What can I do to make my vacuum system pump down faster”
“How will a fingerprint in a vacuum chamber affect my ultimate pressure?”
"What pressure gauge technology is best suited for my vacuum system?"
"What is the best way to find a leak?"

At AVS 62 (Oct. 2015), speaking to our experts automatically entered you in a drawing to win an ipad.
Our winner was Lance Hubbard from The University of Arizona.

At AVS-69 the Magdeburg hemispheres attracted conference attendees to the Ask-the-Expert booth.
Attendees could try to break the vacuum by pulling the hemispheres apart and enter a raffle.
The cash prize was won by Thijs Janssen, a student of Technical University Eindhoven, The Netherlands.

Foricelli Race
The fun “Torricelli Race” manometer competition attracted many conference attendees to the Ask-the-Expert booth at AVS-71 in Charlotte and triggered many discussions with the present experts.

In addition, a poster (by the AVS History Committee) on the making of the Magdeburg Sphere (c. 1657) lead to discussions on sealing and manufacturing technology of that period.

If you have any questions regarding the Ask-the-Expert booth or are interested in being put in contact with an expert, please email the Ask-the-Expert coordinator (http://www.avs.org/Divisions/vtd/Officers).

AVS

Other Professional Associations

Miscellaneous

Reference Pages on Corporate Websites

Kurt J. Lesker
McAllister Technical Services - A short history of vacuum terminology and technology
Pfeiffer Vacuum - Know How

Unit Conversions

Unit Conversions: Pressure, Leak rate/Tightness, Pumping Speed, Volume

List of Textbooks on Vacuum Science and Technology

Author	Title	Publisher	Place	Year	Language	Book code	Pages
Adam, H., Hartmann, H.K. and Schwarz, W.	Vakuumtechnik Aufgabensammlung: Aufgaben, Lösungshinweise, Ergebnisse	Vieweg	Wiesbaden	1996	German	978-3528067588
Alpert, D.	Production and Measurement of Ultra-High Vacuum (Handbuch der Physik 12, 609-663)	Springer	Berlin	1958	English		55
American Vacuum Society	AVS Recommanded Practices on Vacuum Measurements and Techniques	American Vacuum Society		1992	English		89
American Vacuum Society Education Committee	Experimental Vacuum Science and Technology	Marcel Dekker	New York	1973	English
Auwärter, M.	Ergebnisse der Hochvakuumtechnik und der Physik dünner Schichten, Band II	Wissenschaftliche Verlagsgesellschaft mbH	Stuttgart	1971	German	ASIN B0000BQV9N
Bannwarth, H.	Liquid Ring Vacuum Pumps, Compressors and Systems	Wiley	Weinheim / Bergstrasse	2005	English	978-3527312498
Bannwarth, H.	Vakuumpumpen, Kompressoren und Anlagen	VCH - Wiley	New York	1991	German	3-527-28143-6	470
Barrington, A.E.	High Vacuum Engineering	Prentice-Hall	New Jersey	1963	English
Beck, A.H.	Handbook of Vacuum Physics (Vol. 2)	Pergamon Press	Oxford	1968	English
Beck, A.H.	Handbook of Vacuum Physics (Vol. 1)	Pergamon Press	Oxford	1964	English
Ben-hui, G. and Su-jan, C.	Vacuum Physics	Science Press	Beijing	1983	Chinese
Berman, A.	Vacuum Engineering Calculations, Formulas and Solved Exercises	Academic Press	New York	1992	English	978-0120924554
Berman, A.	Total Pressure Measurements in Vacuum Technology	Academic Press	New York	1985	English	0-12-082440-4	380
Berry, H.H.	Thin Film Technology	D. Van Nostrand Co.	New York	1968	English
Bishop, C.A.	Vacuum Deposition onto Webs, Films, and Foils	William Andrew, Inc,	New York	2007	English	978-0815515357
Borichevsky, S.	Understanding Modern Vacuum Technology	Createspace	Massachusetts	2016	English	ISBN-13: 978-1537425054	278
Boxman. R. L., Sanders, D.M. and Martin, P.J.	Handbook of Vacuum Arc Science and Technology: Fundamentals and Applications	William Andrew, Inc,	New Jersey	1995	English	978-0815513759
Brenig, W. and Menzel, D.	Desorption Induced by Electronic Transitions, DIET II (Springer Series in Surface Sciences 4)	Springer	Berlin	1985	English	978-0387155937
Brombacher, W.G., Johnson, D.P. and Cross, J.L.	Mercury Barometers and Manometers	U.S. Government Printing Office	Washington D.C.	1960	English
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Espe, W.	Werkstoffkunde der Hochvakuumtechnik (Band 2)	VEB Deutscher Verlag der Wissenschaften	Berlin	1962	German		720
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Espe, W.	Werkstoffe der Elektrotechnik in Tabellen	Akademie-Verlag Berlin	Berlin	1954	German		150
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Fabian, R.	Vacuum Technology: Practical Heat Treating and Brazing	ASM International	Ohio	1993	English
General Electric Review 23	Manometers for Low Gas Pressures, (Parts II-V)	General Electric Co	UK	1920	English
General Electric Review 24	Theory of Adsorption at Low Pressures and Applications, (Part X)	General Electric Co	UK	1921	English
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Jaeckel, R.	General Vacuum Physics (Handbuch der Physik 12, 515-608)	Springer-Verlag	Berlin	1958	English		94
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Jousten, K. (Hrsg.)	Wutz Handbuch Vakuumtechnik (9. Auflage)	Vieweg	Wiesbaden	2006	German	3-8348-0133-X	820
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Looking at a plasma in vacuum, courtesy of Norbert Koster (TNO)

Karlsruher Institut für Technologie
The main spectrometer of the KATRIN experiment is contained in a large vacuum chamber (10 m diameter and 23 m long). KATRIN was designed to measure the mass of the neutrino directly with a sensitivity of 0.2 eV. Although the chamber was both built and installed in Germany, a land-and-sea journey of 9000 km was required to get it to its final destination in 2006. Near the end of that journey the chamber squeezed through the village of Leopoldshafen.

Maximilien Brice © CERN
A superconducting radio-frequency cavity in the tunnel of the Large Hadron Collider (LHC) near Geneva, Switzerland. Such cavities are located intermittently along the beam pipe to accelerate the particle beam inside the pipe. A vacuum of about 10-8 Pa (10-10 Torr) is required.

ICx Technologies
This carbon dioxide sensor contains a hot filament that both generates narrowband infrared radiation and acts as a narrowband infrared bolometer detector. The MEMS chip was encapsulated with a pressure below 1 Pa (0.01 Torr).

NASA/JPL-Caltech
Ion engines must be tested in a large vacuum chamber. This engine was used on Deep Space 1, the probe that visited Comet Borrelly in 2001. The blue glow is ionized xenon that was electrostatically accelerated through a potential of 1280 V and emitted from the 30 cm thruster through a pair of molybdenum grids. The maximum power of 2.3 kW produced a thrust of 92 mN.

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