Chapters/Divisions/Groups | Spectroscopic Ellipsometry Technical Group
Industrial Applications of Spectroscopic Ellipsometry
Optical Characterization of Thin Films and Nanostructures
Novel Materials
Instrumentation
Big Data, AI and Analytical Methods
Organic Films and Biological Materials
Novel Applications and Theoretical Approaches
The Spectroscopic Ellipsometry Technical Group promotes fundamental basic and applied research using spectroscopic ellipsometry for classical materials science and optical thin film characterization to nanometer scale science and novel optical sensing concepts.
Research topics of the Spectroscopic Ellipsometry Technical Group traditionally focus on optical coatings and inorganic thin films characterization. In recent years there has been a multitude of new advances in instrumentation enabling real-time, spectroscopic data acquisition. These breakthroughs have triggered active research in analytical methods and AI, which is required to tackle the enormous data sets.
The technical group is particularly interested in the exchange of advances on ellipsometric investigations of novel optical and electronic materials and materials with subwavelength structures. Ellipsometry is essential for the characterization of thin films relevant for many industrial applications. For example, the characterization challenges faced in contemporary semiconductor fabrication processes provide inspiration for advances in the technique and its data analysis schemes. Recent advances in the technique which range from increasing accuracy and spectral range to novel acquisition procedures are fostered in this Technical Group.
In addition to the scientific mission, we support the community, including junior and minority scientists and engineers. As a tradition, we award the best student paper, which is selected based on the quality of the research, its presentation, and the discussion during the annual symposium.
Chair
Ufuk Kilic
E-mail: ufuk_kilic @ avs.org
Vice-Chair
Andy Antonelli
E-mail: andrew_antonelli @ avs.org
Treasurer
Nikolas Podraza
E-mail: nikolas_podraza @ avs.org
Secretary
Mathias Schubert
E-mail: mathias_schubert @ avs.org
Communications & Outreach Coordinator
Marcel Junige
E-mail: marcel_junige @ avs.org