Course Objectives

• Understand the pump factors that limit ultimate pressure.
• Know the degassing methods that minimize the total outgassing rate.
• Learn how to measure total and partial pressures in UHV.
• Learn the operating methods necessary to maintain UHV.

Course Description

Ultrahigh vacuum (UHV) is a required environment for many research areas, such as surface science (which requires the use of electron, ion, and neutral spectroscopies), as well as for many technological areas, such as thin-film growth of electronic and optical materials. In this course, the techniques involved in the production, measurement, and operation of such pressure levels are discussed.

In addition to kinetic theory, system design elements--such as methods of pumping, materials selection, materials processing, outgassing considerations, system degassing, instrument degassing, surface effects, pressure-limiting factors, methods to shorten pumpdown time, and sample transfer systems--are reviewed. Special emphasis is given to total and partial pressure measurement within UHV systems. Various applications requiring an operational UHV environment are also discussed.

The course concludes with an open forum to exchange new ideas and techniques.

Online Costs:
$350 – AVS Platinum Member
$400 – AVS Gold/Silver Member
$400 – Non-Member
$200 – Full Time Student

Course Materials

Course Notes