Course Objectives

• Understand the concepts and physical basis of commercially available gauging.
• Gain an understanding of the limitations of vacuum gauging.
• Learn the advantages and disadvantages of different gauging methods.
• Be able to select gauging appropriate for the application.
• Learn proper use and operation of gauging.
• Learn to make better and more reliable pressure measurements.

Course Description

All vacuum systems use one or more of the many available gauging methods to either monitor system conditions to ensure control during a process. The aim of this course is to provide a firm understanding of available vacuum gauging methods. This will allow users to select the gauging technique that best fits their needs and applications. Additionally, users will gain knowledge in the correct use and operation of each gauge type.

Gauge types covered include the capacitance manometer, spinning rotor gauge (SRG), thermocouple gauge, Pirani gauge, and hot and cold cathode ionization gauges. The discussion of each type covers principles, useful pressure range, correct use, precautions to obtain reliable and accurate measurements, and good and bad applications. Accuracy/repeatability information drawn from the literature will also be reviewed for each type of gauge. Using a combination of the gauge types discussed, pressures from atmosphere to 10-11 Torr (10-9 Pa) can be measured.

Course Materials

Course Notes