Course Objectives

• Understand vacuum fundamentals essential to operating, maintaining, designing, or using vacuum systems.
• Know the working principles and limitations of pumps, gauges, and other vacuum system components.
• Understand the procedures for operating and performing preventive maintenance on vacuum systems, including analyzing and troubleshooting malfunctioning vacuum systems and leak detection.
• Learn the design concepts involved in matching equipment and instrumentation to applications.

Course Description

This extensive four-day course provides a working knowledge of vacuum equipment and the technology associated with its use. It includes enough theory to provide a basis for the material covered; however, the major emphasis is on practical applications.

The working principles of the pumps and gauges used on vacuum systems are discussed, followed by a description of the characteristics of pumps and gauges in current use. Characteristics required of components such as valves, connecting lines, flanges, and seals that connect pumps to process chambers are described next, especially with regard to the application (i.e., medium-, high-, or ultrahigh vacuum conditions). The materials normally used for vacuum systems are discussed, especially with regard to handling, fabrication, and cleaning procedures.

Procedures for system operation, preventive maintenance, and leak detection are covered with emphasis on practical applications. In addition, techniques used to troubleshoot systems operating at less than optimum levels are provided. System design concepts for matching equipment and instrumentation to the intended application are also covered.

Course Materials

Course Notes