- Understand the radio frequency (RF) plasma system as an electronic circuit.
- Learn a systematic approach to viewing a RF plasma system.
- Know techniques for maintaining and troubleshooting RF systems.
This introductory course provides maintenance and equipment engineers and technicians with a basic working knowledge of RF technology as it is applied to semiconductor processing equipment.
The role of RF in the various deposition processes, including sputter deposition and etching systems, is discussed. The characteristics and uses of various components that make up an RF system are described. The differences between resistive and reactive components are explained as well as the differences between series and parallel resonance.
Under reactive components, the course covers tuning circuits, filter circuits, and the plasma chamber itself. The use of inductive versus capacitive coupling of RF power into the plasma discharge is reviewed as well as methods for measuring target and substrate voltages and their relation to ion energies.
The course also includes discussions of the operation and use of RF power amplifiers, transmission lines, and matching networks.
Course Cost: $1020
Who should attend?
Engineers and equipment technicians who use RF power in vacuum systems and require a working knowledge of RF fundamentals.
Research Staff at Oak Ridge National Laboratory