2023 AVS Michigan Chapter Spring Symposium
Title: Thin Films and Plasma for Future Microelectronics
Location: NCRC University of Michigan, Ann Arbor, Michigan
Date: Wednesday, June 7, 2023 (8:00AM - 8:00PM)
Reason/motivation for the Symposium
The current state of semiconductor microelectronic systems and technologies across computing,
sensing, and communications is at a crossroads. Now that transistor dimensions are shrinking to
a single nanometer, putting a practical limit on controlling its classical operation, Moore’s law
will end by around 2025. Therefore, future materials, device concepts and architectures, and
systems need to be developed and designed using innovative approaches that has forward-
looking considerations of the technology chain.
CHIPS and Science Act of 2022 is making historic investments that should strengthen American
manufacturing, supply chains, and national security, and invest in research and development,
science and technology, and the workforce of the future to keep the United States the leader in
the industries of tomorrow… All that put a spotlight on semiconductor R&D, current status of
US industry and education.
AVS MI Symposium 2023 will bring together experts from academia, research and industry to
facilitate discussions on the future of US semiconductor ecosystem with emphasis on midwestern
and Michigan infrastructure, economy and education. We invite and welcome participants across
all disciplines, backgrounds, education levels and institutions who might be interested in the
future of semiconductors.
This year’s Symposium will feature plenary and invited talks, a poster session and an industrial exhibition. We are excited to announce our plenary speakers:
- Prof. Michael Shur, RPI, “Terahertz Nanoplasmonics Technology: Physics, Applications, and Commercialization”
- Prof. Rebecca Peterson, UofM “The Role of Academic Nanofabrication Facilities in Growing Semiconductor Ecosystem”
- Prof. John Verboncoeur, MSU, “CHIPS Act and its Relations to the Infrastructure and Economy in Midwest and MI in Particular”
Michigan Semiconductor Hands-On Workshop (M-SHOW): Intro to Semiconductor Technology Workshop on Thursday, June 8, 2023
The Lurie Nanofabrication Facility (LNF)
at the University of Michigan is hosting a hands-on
workshop on Semiconductor Fabrication Technologies the day after the Symposium, on Thursday June 8, 2023 from 8 AM to 5 PM at the LNF. This workshop is intended for an audience with limited exposure to cleanrooms and semiconductor processing and will provide hands-on experiences inside the cleanroom, tours of the cleanroom and its infrastructure, and an overview of the LNF’s capabilities and operations. Register online at this link.
For more information, email: info@LNF.umich.edu