The technical structure of AVS is organized as a matrix. Members can participate in one or more Divisions or Technical Groups, each of which is focused around a major topical area. Members may also participate in Chapters and Student Chapters, which are regional organizations that focus on local area needs.

Vacuum Technology - Invited Talks



  • Novel Diaphragm Vacuum Gauge
    - Masatoshi Ono, Vacuum Products Corporation
  • Improved Reliability of High Sensitivity Leak Testing of Large Chambers
    - Brad Shaw, Leak Testing Corporation
  • Update on the A+ Upgrade to LIGO and the COSMIC Explorer
    - Michael Zucker, LIGO
  • On ground and in-orbit decontamination strategies for space equipment
    - Faye Delphine, CNES
  • Stand-Alone Vacuum Cell for Compact Ultracold Quantum Technologies
    - Oliver Burrow, Strathclyde University
  • State of the Art and Roadmap for Hybrid Quantum-Hpc Computing Clouds in Europe
    - Richard Versluis, TNO/QuTech
  • Cs Intercalation of 2d Material Encapsulated Photocathodes
    - Mengjia Gaowei, Brookhaven National Laboratory
  • Saving Energy of Subfab Equipment for Semiconducor Manufacturing
    - Yohei Yoda, EBARA


  • Much to Do About Nothing: Advancing Compact UHV Packages for a “Quantum Everywhere” Future
    - Alex Tingle, ColdQuanta
  • Towards an Ionization Vacuum Gauge Suitable as a Reference Standard
    - Nenad Bundaleski, NOVA University Lisbon
  • Developments of the Vacuum Systems Required for the Electron Ion Collider
    - Charles Hetzel, Brookhaven National Laboratory
  • Vacuum System of the MAX IV 3 GeV Storage Ring: Design and Performance
    - Marek Grabski, Max IV Laboratory
  • CW Superconducting Linac for the LCLS-II HE Free Electron Laser at SLAC
    - Marc Ross, SLAC National Accelerator Laboratory
  • Vacuum Materials for the Next Generation Gravitational Wave Detectors
    - Ivo Wevers, G. Bregliozzi, P. Chiggiato, M. Rimoldi, C. Scarcia, M. Taborelli, CERN
  • Vacuum Design for a Cryogenic Gravitational Wave Detector
    - Rana Adhikari, C. Wipf, California Institute of Technology
  • Design of ITER Roughing Pump System
    - Charles Smith, S. Smith, US ITER
  • Design and Fabrication of Ultra-High Vacuum Test System for Quantitative Determination of Hydrogen Gettering and Permeation of Various Materials
    - Ewa Ronnebro, R. Storms, S. Suffield, Pacific Northwest National Laboratory;
    - M. Boeckmann, A. Parrot, J. Alfrey, Vacuum Technology, Inc


  • Innovations in Gauges and Gas Analysis
    Klaus Bergner, VACOM
  • Overview of the Outgassing Behavior of Metals Polymers and Ceramics
    - Katharina Battes, Karlsruhe Institute of Technology (KIT)
  • SynRad and MolFlow for Vacuum Analysis of CERN
    - Marton Ady, CERN
  • Progress in the Construction of the ITER Vacuum System and Advancement in Vacuum Technologies for Fusion
    - Robert J.H. Pearce, ITER
  • Latest Developments and Uses of Neg Technology in Fusion Energy Applications
    - Enrico Maccallini, SAES Getters
  • Micro-Scale Fusion and Neutron Generation from Nanowire Arrays Irradiated With Ultrashort Laser Pulses of Relativistic Intensity
    - Jorge Rocca, Colorado State University
  • Vacuum Technology for Fusion Research
    - Christian Day, Karlsruhe Institute of Technology (KIT)
  • Small Diameter NEG Coated Vacuum Chambers by Copper Electroforming
     - Lucia Lain Amador, CERN
  • Next Generation Synchrotron Light Source: Vacuum System of the 3 GeV Electron Storage Ring at MAX IV Laboratory
    - Marek Grabski, Max IV Laboratory
  • The NIST Quantum Logic Clock and its Vacuum Performance
    - David Leibrandt, NIST-Boulder
  • Vacuum Technology of Hyperloop
    - Tom Kammermeier, Leybold
  • Quality and Regulatory Issues for Vacuum Technology in Nuclear Power Plants
    - Charles Smith, US ITER / ORNL



  • Superconducting Microwave Cavity Quantum Pressure Standard in the range 200 Pa to 20 kPa
    Laurent Pitre, LNE Cnam-LCM
  • e-beam Melting of Copper       
    Diana Gamzina, SLAC
  • Gas Dynamic simulations
    Irina Graur, University of Aix-Marseille
  • Next generation LIGO vacuum system
    Chandra Romel, LIGO Hanford
  • HE-LHC Vacuum System Design
    Giuseppe Bregliozzi, CERN
  • Vacuum System Modeling, Design, and Commissioning at the Facility for Rare Isotope Beams SEM Tools
    Ian Malloch, MSU 
  • Status of the vacuum technology for PV/NREL contributions to photovoltaics
    Tim Gessert, NREL 
  • Single Atom Transistors
    Rick Silver, NIST 
  • Defect Manipulation to Control Energy Processes in Electronic Materials
    Leonard Brillson, Ohio State


  • Pharmaceutical Freeze-Drying and Vacuum-Drying: Challenges and Opportunities
    Evgenyi Shalaev, Allergan
  • Beamline Technology and Current Modeling Capabilities for Ion Implantation       
    Svetlana Radovanov, Applied Materials, Varian Semiconductor Equipment
  • Gas Adsorption and Desorption Properties of 3D Printed Objects
    Matt Hartings, American University
  • The Development of the Spacecraft Atmosphere Monitor
    Steven Schowalter, Jet Propulsion Laboratory
  • Design of Vacuum Control System for the Linac Coherent Light Source II (LCLS-II) at SLAC National Accelerator Laboratory
    Shweta Saraf, SLAC National Accelerator
  • The Importance of Vacuum Cleanliness in Semiconductor Process Control SEM Tools
    Irit Ruach Nir, Applied Materials, Israel 
  • Vacuum Chamber Design and Fabrication
    Steve Greuel, Nor-Cal Products 
  • Plasma Window as Vacuum Atmosphere Interface for Various Applications
    Ady Hershcovitch, Brookhaven National Laboratory 
  • Compact Ultra High Vacuum Systems for Applications of Cold Matter
    Evan Salim, ColdQuanta Inc.


  • Fast-Switching Dual Fabry-Perot Cavity-based Optical  Refractometry – A Powerful Technique for Drift-Free Assessment of Gas Refractivity and Density
    Ove Axner, Umeå University, Sweden
  • ROSINA/Rosetta: Exploring the origin of our solar system with mass spectrometry in space
    Kathrin Altwegg, Univ of Bern, Switzerland
  • Weight of water on the solid surface in air and vacuum  
    Richard Green, NRC, Canada
  • A rigorous approach to effluent gas management for the vacuum processing industry
    Paul Dozoretz, MKS Instruments, USA
  • Vacuum technology that enabled the detection of gravitational waves
    Rai Weiss, LIGO/MIT, USA
  • Adsorption/Desorption from amorphous carbon coating at cryogenic temperatures
    Anne-Laure Lamure, CERN, Switzerland
  • Quantum Approach to Extreme High Vacuum Metrology
    Julia Scherschligt, NIST, USA
  • Particle Contamination Control in the accelerator vacuum systems of the European XFEL
    Lutz Lilje, DESY, Germany
  • UHV- and cryo-transfer between independent analytical instruments
    Urs Maier, Ferrovac, Switzerland
  • Silicon-micromachined Turbomolecular Pump
    Wei Yang
  • New aspects on heavy ion-induced desorption and their impact on next generation accelerators
    Markus Bender, GSI, Germany
  • Development, Solution of Design Issues, Final Design and Performance of an Electrostatic Triode Getter-Ion Pump, 1967- 1973
    Paul Arnold, MKS Instruments, USA
  • Superlubricity of Hard Compliant Carbon Coatings  with green lubricants: Role of Surface Chemistry and Structural Changes
    Maria-Isabel De Barros Bouchet, Ecole Centrale de Lyon - LTDS, France
  • Structure Evolution in Tribological Interfaces Studied by Multilayer Model Alloys
    Martin Dienwiebel, KIT, Germany
  • Studying Dynamic and Structured Plasma Systems Utilizing Laser-Collision Induced Fluorescence
    Ed Barnat, Sandia National Laboratory, USA
  • In-Situ Diagnostics of Processing Plasma and Semiconductor Films for High-Efficiency Silicon Hetero-Junction Solar Cells
    Shota Nunomura, AIST, Japan


  • Industry Practice for Using Primary Leak Standards to Validate Calibration Methods
    Jason Alfrey, Vacuum Technology INC
  • Vacuum Adventures on the Way Towards a Field-Portable Helium Isotope Detector
    Gary McMurtry, University of Hawaii
  • Applicative Challenges for today’s Turbo Molecular Pumps
    Adrian Wirth, Pfeiffer Vacuum GmbH, Germany
  • Vacuum System Analysis of a Next Generation Light Source with Synrad and MolFlow+
    Jason Carter, Argonne National Laboratory
  • Vacuum Design of the European Spallation Source Target Monolith
    Peter Ladd, European Spallation Source, Sweden
  • Saving Megawatts in a Micron: Tailoring the Surfaces of Superconducting RF Cavities
    Sam Posen, Fermi National Accelerator Laboratory
  • High Quality Vacuum Components for UCV and UHV Applications
    Michael Flämmich, VACOM, Vakuum Komponenten & Messtechnik GmbH, Germany
  • Vacuum Transport for Realization and Dissemination of the Redefined Kilogram at NIST
    Eric Benck, NIST
  • It's All Because of the Vacuum...
    - Frederick Dylla, American Institute of Physics
  • The Next Generation Quantum-based Metrology for Miniaturized Sensors and Standards
    - Gregory F. Strouse, National Institute of Standards and Technology


  • The Evolution of Cryopumps
    - Sergei Syssoev, Brooks Automation, Chemsford, MA
  • MAXIV Vacuum System: From Design to Operation
    - Eshraq Al Dmour, Max IV, Lund University, Lund Sweden
  • Double Deflection and Enhanced Detection - The Use of a Novel Ion Optics for Metastable Rejection and Improved Detection in the Low ppb Range.
    - Jonathon Leslie, MKS Instruments, Inc., Andover, MA
  • The Deployment of a Commercial RGA to the International Space Station
    - Matt Kowitt, Stanford Research Systems, Sunnyvale, CA
  • History of Widely-used Vacuum Gauges and the Variations and Motivations that Occurred Along the Way: How Did We Get Where We Are?
    - Paul Arnold, MKS Instruments, Inc., Granville Phillips Product Center, Longmont, CO
  • Current Advances in Materials and Methods for UHV and XHV Environments
    - Jed Bothell, Atlas Technologies Port Townsend WA
  • Current Advances in Materials and Methods for UHV and XHV Environments
    - Austin Henry, Atlas Technologies Port Townsend WA
  • Plasma Cleaning of SEMs and Large Vacuum Systems
    - Ron Vane, XEI Scientific Inc., Redwood City, CA
  • Mobile Vacuum Environments and Their Applications for Semiconductor Manufacturing
    - Daniel Babbs, Brooks Automation, Chelmsford, MA
  • Experience of UHV Transportation of Critical Components
    - Paolo Michelato, Italian National Institute for Nuclear Physics (INFN), Milan, Italy
  • Particle Behavior in Vacuum Systems: Protection Schemes for EUVL Critical Surfaces, Speed Controlled Particle Injection, Prevention of Particle Formation during Pump Down
    - David Pui, University of Minnesota, Minneapolis, MN


  • Miniature Fiber Optic Pressure Sensors: Technologies and Applications
    - Miao Yu, University of Maryland, College Park
  • How to Create as Less as Possible to Make the Best as Possible
    - Norbert Koster, TNO Technical Sciences, Netherlands
  • Novel Vacuum Processing of Thin-Film Photovoltaic Materials
    - Jason Myers, U.S. Naval Research Laboratory
  • Gas Dynamics Modelling Efforts at CERN
    - Roberto Kersevan, CERN,Switzerland
  • Improving the Performances of Getter Pumps: Recent Developments in NEG Technology
    - Fabrizio Siviero, SAES Getters, Italy

  • Advanced High Speed Water Vapor Cryopumps: Enabling Today’s Vacuum Processes
    - Kevin Flynn, Brooks Automation, Inc., Polycold
  • Our Present Understanding of Outgassing
    - Manfred Leisch, Graz University of Tech., Austria
  • Ultimate Limits in the Gas Composition Determination Within Small Sealed Volumes by Quadrupole Mass Spectrometry
    - Vincenc Nemanic, Jozef Stefan Institute, Slovenia
  • Vacuum Technology Developments at Daresbury Laboratory for Modern Accelerators
    - Keith Middleman, (Presented by: O.B. Malyshev), STFC Daresbury Laboratory, UK
  • Progress in Thin Film Technology for Superconducting RF Applications
    - Anne-Marie Valente-Feliciano, Thomas Jefferson National Accelerator Facility
  • Load locks, Transfer arms, and other In-Vacuum Motions in the Cornell DC Photoelectron Gun Development Project
    - Karl Smolenski, Cornell University
  • Design Optimization and Fabrication Progress of ITER’s Large Custom Vacuum Pumps
    - Robert Pearce, Oak Ridge National Laboratory


  • The Important Role of Vacuum Technology in the Redefinition of the Kilogram
    - P.J. Abbott, NIST
  • Modeling and Simulation of Fast Flows in the Vacuum Regime,
    - S. Pantazis, Physikalisch-Technische Bundesanstalt (PTB), Germany
  • 60 Years of Vacuum Gate Valve Developments
    - J.F. Hartnett, Vacuum Research Corporation
  • A History of Vacuum from My Perspective!
    - K.J. Lesker III, K.J. Lesker IV, Kurt J. Lesker Company
  • How We’ve Learned More & More About Less and Less So That Now We Know a Whole Lot About Nearly Nothing - Vacuum Measurement Over the Years
    - S.R. Goldfarb, Consultant
  • The Quest for Extreme High Vacuum
    - H.F. Dylla, American Institute of Physics
  • The Relationship Between Moisture Ingress, Hermeticity Testing, and Internal Gas Analysis (IGA) of Hermetic Structures
    - J.C. Pernicka, Pernicka Corporation
  • Applications and Limitations of Wear-Resistant PVD Coatings
    - A. Mueller, OC Oerlikon Balzers AG, Liechtenstein
  • Optics Contamination in EUV Lithography: Measurement, Modeling and Mitigation
    - S.B. Hill, N.S. Faradzhev, T.B. Lucatort,  National Institute of Standards and Technology (NIST), B.V. Yakshinskiy, R.A. Bartynski; Rutgers University
  • Recent Innovation in Dry Pumping Technology
    - A.D. Chew, I. Stones, N. Schofiel,  Edwards, UK
  • Symbiotic Relation between High Energy Accelerators and Advanced Medical Treatments
    - J.R. Noonan, D.R. Walters, Argonne National Laboratory
  • Growth and Characterization of High Quantum Efficiency Photocathodes for the Cornell ERL R&D Project
    - L. Cultrera, I. Bazarov, B. Dunham, Y. Li, X. Liu, A. Bartnik, K. Smolenski, S. Karkare, W. Schaff, T. Moore; Cornell University


  • A Truly Cold Vacuum Gauge for Ultra–high Vacuum and Extreme–high Vacuum Employing a Hydrogen Absorber
    - G.A. Mulhollan, Saxet Surface Science First International
  • Comparison of Standard Leak Calibrations of Metrological Institutes
    - K. Jousten, K. Arai, U. Becker, O. Bodnar, PTB, Germany
  • Mass Spectrometry a Mile Deep: Issues and Solutions for Underwater Vacuum Systems
    - R.T. Short, SRI International
  • Gas Dynamics Modelling for Particle Accelerators
    - O.B. Malyshev, STFC Daresbury Laboratory, UK
  • Design of the Vacuum System for the SuperKEKB Positron Ring
    - Y. Suetsugu, K. Kanazawa, K. Shibata, T. Ishibashi, H. Hisamatsu, M. Shirai, S. Terui, High Energy Accelerator Research Organization, Japan
  • Contamination Control and Cleaning Techniques for Ultra Clean Vacuum Systems
    - H.C.G. Werij, N.B. Koster, J.C.J. van der Donck, A.J. Storm, R. Verberk, R. Versluis, TNO Technical Sciences, The Netherlands
  • Superconducting Niobium for Accelerator Cavities: Status and prospects (VT+AS+SS)
    - M.J. Kelley, Jefferson Lab and College of William and Mary


  • Extending the Range of the Spinning Rotor Gage for Vacuum Measurements and Calibrations
     - M.L. Duncan, J.A. Keck, Oak Ridge National Laboratory
  • Numerical Methods for the Design of Vacuum Systems with Examples
    - R. Kersevan, ITER International Organization, France
  • Low Uncertainty Measurements of Trace Water Vapor Based on Cavity Ring-Down Spectroscopy
    - T. Hodges, National Institute of Standards and Technology
  • Status of National Synchrotron Light Source II Vacuum Systems
    - H.C. Hseuh, A. Blednykh, L. Doom, M.J. Ferreira, C. Hetzel, J.P. Hu, S. Leng, C. Longo, V.Radindranathh, K. Roy, S. Sharma, F. Willeke, K. Wilson, D. Zigrosser, Brookhaven National Laboratory
  • Examples of Surface Related R&D on Nb Samples and SRF Cavities for Particle Accelerators at JLab
    - A.T. Wu, Thomas Jefferson National Accelerator Facility
  • New UHV Low Temperature Scanning Probe Microscopy Facility for the Study of Future Electronic Materials
     - J.A. Stroscio, National Institute of Standards and Technology
  • Modelling and Simulation of the ITER Cryopumping Systems
    - Chr. Day, Karlsruhe Institute of Technology, Germany
  • Waste Not, Want Not
    - L.V. Mannes, South Park Platinum, Inc.


  • Practical Issues and Applications for Vacuum and Hermetic Microsystems Packaging
     - K. Ewsuk
  • Miniature Mass Spectrometers and Ambient Analysis by Mass Spectrometry
     - R.G. Cooks
  • Point-of-Use Abatement Devices and Exhaust Management Strategies
    - J. Brown
  • Architecture and Operation of the Z Pulsed Power Facility Vacuum System
    - J.W. Weed 


  • Silicon-based Surface Treatments for Improved Vacuum System Throughput, Inertness, and Corrosion Resistance
    - D.A. Smith
  • A Novel Electrostatic Ion Trap Mass Spectrometer
    - B.J. Hinch
  • Gas Dynamics Aspects of Atomic Layer Deposition
    - S.M. George
  • Vacuum R&D at Cornell Towards to Cornell Electron Storage Ring Test Accelerator for ILC Damping Ring and the ERL-based Light Sources
    - Y. Li


  • A Review of the Development of Cleaning Processes and Cleanliness Assessment at Daresbury Laboratory
     - J.D. Herbert
  • Sorption Properties of Non Evaporable Getter Pumps for Selected Hydrocabons and Organic Compounds
    - A. Conte
  • LHC Beam & Insulation Vacuum Systems
    - J.M. Jimenez
  • Vacuum Metrology in Korea, Value Innovation for Customers
    - K.H. Chung
  • Molybdenum Oxide Nanoparticles for Improved Lithium Ion Battery Technologies
    - A.C. Dillon


  • Miniature High Vacuum Pump for Mars Analytical Instruments
    - R.J. Kline-Schoder
  • Development of MEMS for Space Applications
     - P.W. Valek
  • The Role of Vacuum-Based Processes in Developing High Performance Chemical Microsensors
    - S. Semancik
  • Review of Seven Years Field Application Experience of an EPX Single Mechanism for High Vacuum Pumping
    - A.D. Chew
  • Surface Morphology and Surface Composition of Vacuum Fired Stainless Steel
    - M. Leisch
  • Recent Advances to Enhance Space Simulation
    - F.G. Collins


  • Limiting Processes in Vacuum Measurement
    - P. Looney
  • Extreme High Vacuum (XHV): The Need, Production and Measurement
    - M.L. Stutzman
  • Outgassing of Construction Materials for Vacuum Chambers and Coatings for Reduction of Outgassing
    - J. Setina
  • New Understanding of Ion-Beam Induced Gas Desorption
     - A.W. Molvik
  • Experimental Investigation of the Near-Earth Space
    - M. Wüest
  • Report from the Mars Chapter
    - M.H. Hecht
  • Benjamin Franklin and the Meaning of Public Science
    - J.E. Chaplin
  • Monolayers Films: From Franklin's OIl-Drop Experiments to Self-Assembled Monolayer Structures
    - G.L. Richmond
  • The Science and Technology of Electrophotography
    - L.B. Schein
  • From Lightning to Lighting: Physics and Technology Discharged from Franklin's Kite Experiment
    - R.T. McGrath
  • Progress and Prospects in the Generation of High Voltage
    - H.F. Dylla


  • Selecting Vacuum Instrumentation for Your Applications
    - C.R. Tilford
  • Pressure Dependence of Laminar-Turbulent Transition in Gases
    - L.D. Hinkle
  • Hydrogen in Vacuum Systems: An Overview
    - R.A. Outlaw
  • Hydrogen in Vacuum Systems
    - B. Hjörvarsson


  • John Ambrose Fleming and the Beginning of Electronics
    - H.F. Dylla
  • Vacuum and the Electron Tube Industry
    - P. Redhead
  • The Science and Technology of Pumping Residual Gases in Vacuum Tubes
    - B. Ferrario
  • Vacuum Microelectronic Devices and Vacuum Requirements
    - G.E. McGuire
  • Ultra Cleaning Techniques and Their Use in Vacuum Technology
    - P.H. LaMarche
  • Contamination Control in PECVD Processes
    - B. Shin
  • An Overview of the Spallation Neutron Source Vacuum Systems
     - P. Ladd


  • Fifty Years of Vacuum Science
    - E.V. Kornelsen
  • The Measurement of Vacuum;1950-2003
     - P.A. Redhead
  • Major Advances in Capture Pumps in the Last 50 Years
    - K.M. Welch
  • Major Advances in Transfer Pumps; 1953-2003
    - M.H. Hablanian
  • The Development of Ultrahigh and Extreme High Vacuum Technology for Physics Research
    - H.F. Dylla
  • Quartz Capillary Gas Flow Meters
    - R.F. Berg
  • How to Control Hydrogen Outgassing from Gauges and Materials
    - F. Watanabe
  • Residual Gas in the LIGO Beam Tubes: Science, Arts and Recipes
     - R. Weiss
  • Component Requirements for ALD Technology
    - T.E. Seidel
  • The Role of Outgasssing, Outdiffusion and Desorption in Vacuum Coating
     - D.M. Mattox
  • Vacuum Thermal Insulation - Inventions for the Future
    - V. Nemanic


  • Self-Assembled Monolayers of Carboxy-Terminated Poly(ethylene glycol): Protein Resistance, Biospecific Functionalization and Application to Immunodiagnostics
    - R. Dahint
  • Analysis of Organic and Biological Materials in Ultra-High Vacuum
     - D.G. Castner
  • Design Fabrication and Processing of Vacuum Chambers for High Energy Accelerators at Brookhaven
     - H.C. Hseuh
  • Advanced Materials and Fabrication Techniques for the Next Generation Light Source
     - J.R. Noonan
  • Gaede Langmuir Award Address: The Impact of Non-evaporable Getters on the Evolution of UHV/XHV Technology
     - C. Benvenuti
  • Ultra-sensitive Detection of Helium Release from Metal Tritides
     - J. Poths
  • Influence of Thermal and Surface Treatments on the Outgassing Of Austenitic Stainless Steels Studied by Thermal and Electron Stimulated Desorption
    - P. Chiggiato
  • Eight Unconventional Gauges: A User's Impressions
    - B.R.F. Kendall
  • Using DeviceNet for Improved Vacuum Monitoring
    - C.E. Karlsen
  • Modeling Molecular Drag Pumping in the 20th Century: A Personal View
     - J.C. Helmer


  • Sealed Vacuum Systems including Vacuum Insulation
     - I.P. Della Porta
  • Precision Multilayered Thin Films for Manufacturing of the Next Generation of Computer Chips
     - E Spiller
  • Gold Nanoparticle Films via Inert Gas Deposition: Biased Percolation and Current Induced Organization During and after Deposition
     - L.B. Kish
  • Towards the Single Pump Solution - A Recent Advance in High Speed Machines for Dry Vacuum Pumping
    - R.G. Livesey
  • Water Vapor Capture Within a Vacuum Chamber - The Technology of Meissner Cryopumping Yesterday and Today
    - D.J. Missimer
  • History of Alcatel Turbomolecular Pump Development
     - R. Mathes
  • Turbine-type Pumps in High-vacuum Technology
    - M.H. Hablanian
  • New Results on Outgassing of Stainless Steel and Insulators
    - L. Westerberg
  • A Different View on the "Water Problem
    - R.W. Dobrozemsky 
  • Performance Test of Vacuum Components and System
    - K.H. Chung
  • Residual Gas Analysis using Microengineered Systems
    - S. Taylor
  • Advances in Semiconductor Physical Vapor Deposition Equipment; Vacuum, System Architecture, and PVD Source Technology
     - D.J. Harra
  • Vacuum System Architecture for Disk and Flat Panel Production Tools
     - J. Busch
  • Downstream Effluent Management Subsystems for Semiconductor Manufacturing Processes
    - Y. Gu
  • RHIC Commissioning and First Results
    - S. Ozaki


  • Field Emission Characteristics of Carbon Nanotubes
    - B.R. Chalamala
  • Reliability of Silicon-based Field Emission Displays
    - T. Akinwande
  • Illumination Sources for Laser-based Displays
    - B. Bischel
  • Challenges in Bringing Green Manufacturing Technologies to the Clean Room Floor
    - S. Raoux
  • Eliminating Perfluorocompound Gas Emissions from CVD Chamber Cleans
    - P.J. Maroulis
  • Treatment of Wastes from Chemical Mechanical Polishing Operations
    - S. Raghavan
  • Advanced Chemicals for Semiconductor Processing
    - E.R. Sparks
  • The United States Constitution and Vacuum Technology
    - C.R. Tilford
  • The Role of Two-dimensional Compressibility in Physisorption, Competitive Adsorption and Dynamic Displacement
    - G.A. Kimmel
  • Free Jets in Vacuum Technologies
    - A.K. Rebrov
  • Design, Construction and Maintenance of Large Vacuum Systems
    - K.M. Welch
  • The Interesting and Important Problem of Water in Vacuum Systems
    - H.F. Dylla
  • Miniature Vacuum Pumps
    - J.W. Weed
  • A Practical Guide to the use of Bayard-Alpert Ionization Gauges
    - J.H. Singleton

  • Micromechanical Devices for Force Measurement
     - T.W. Kenny
  • Developing MEMS Vacuum Pumps
    - E.P. Muntz
  • Nanotribology and Stiction Studies of Surface Micromachined Electrostatic Micromotors Using An Atomic Force/Friction Force Microscope
     - B. Bhushan


  • Effects of Residual Gas Exposures on the Emission Characteristics of Field Emission Arrays
    - R.M. Wallace
  • Hermetic Sealing and Evacuation of Candescent's ThinCRTTM
     - T.S. Fahlen
  • Enhanced Bayard-Alpert Gauge with Accuracy and Stability Improved by Design and Construction
    - P.C. Arnold
  • Vacuum Systems, Deposition Sources, Measurement and Control Tools for the Semiconductor Industry (1950-1975)
    - D.E. Meyer
  • Evolution of Integrated Circuit Vacuum Processes: 1962-1975
     - R.K. Waits
  • Refining Old Vacuum Knowledge for Today's Semiconductor Manufacturing Processes
    - J.F. O'Hanlon
  • Review of Pumping by Thermal Molecular Pressure
    - J.P. Hobson
  • Dry Vacuum Pumps - A Method for the Evaluation of the Degree of Dry
    - A.D. Chew
  • Ebara AAS-series Screw-type Dry Vacuum Pump
    - Y. Watanabe
  • Adapting Dry Vacuum Technology to Cu CVD Effluent Abatement in Integrated Circuit Manufacturing
    - J.R. Bottin
  • Dry Pumping
    - P. Annandale
  • The Dry Pump in the Industrial Market
    - J. Scherbik
  • Review of Models for the Outgassing of Water Vapor from Metallic Surfaces
    - B.B. Dayton
  • Quadrupole Mass Spectrometry using MEMS
    - S. Taylor
  • John A. Thornton Memorial Award Lecture: The Search for Improved Transparent Conducting Oxides: An Investigation of CdO, Cd2SnO4, and Zn2SnO4
    - T.J. Coutts
  • Experiences on the Preparation and Assembly of The Superconducting Linear Accelerator for the TESLA Test Facility
    - A. Matheisen