MEMS and NEMS Technical Group

Advancing the Science and Technology of Materials, Interfaces, and Processing


  • The materials science, characterization and reliability of MEMS
  • Fabrication techniques and integration technologies for MEMS
  • Nanoelectromechanical Systems (NEMS)
  • BioMEMS
  • Microfluidics
Email comments or questions


Chair

Christian A. Zorman
Case Western Reserve University
Dept of Electrical Eng Computer Sci
715A Glennan Bldg
2123 Martin Luther King Jr Blvd 
Cleveland, OH 44106
Ph: 216-486-0757
E-mail: christian_zorman@avs.org

Co-Chair

Robert Davis
Brigham Young University
N215 ESC
Physics and Astronomy
Provo, UT 84602
Ph: 801-885-7070
E-mail: robert_davis@avs.org

Secretary

Wayne Hiebert
National Institute for Nanotechnology
University of Alberta, Canada
11421 Saskatchewan Drive
Edmonton, AB T6G 2M9
Ph: 626-395-2550
E-mail: wayne_hiebert@avs.org

Treasurer

Susan Burkett
University of Alabama
101 Houser Hall
Tuscaloosa, AL 35487-0286
Ph: 205-348-4378
E-mail: susan_burkett@avs.org

Program Chair

Wayne Hiebert
National Institute for Nanotechnology
University of Alberta, Canada
11421 Saskatchewan Drive
Edmonton, AB T6G 2M9
Ph: 626-395-2550
E-mail: wayne_hiebert@avs.org

Program Co-Chair

Sushma Kotru
University of Alabama
2034 NERC
245 7th Avenue
Box 870286 
Tuscaloosa, AL 35487
Ph: 205-348-7235
E-mail: sushma_kotru@avs.org


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